Physical quantity sensor, physical quantity sensor device, electronic apparatus, and movable object

ABSTRACT

A physical quantity sensor includes a stationary electrode, an X-axis displaceable movable member, and a movable electrode. The stationary electrode includes first and second movable electrodes arranged side by side along the Y-axis direction. The first and second stationary electrodes respectively include first and second stationary electrode fingers extending from first and second trunks in the ±Y-axis directions. The movable electrode includes first and second movable electrodes arranged side by side in the Y-axis direction. The first and second movable electrodes respectively include first and second movable electrode fingers located on both sides in the Y-axis direction of the first and second trunks, and opposed to the first and second stationary electrode fingers.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.15/833,272, filed Dec. 6, 2017, which claims priority to Japanese PatentApplication No. 2016-237919, filed Dec. 7, 2016, both of which arehereby expressly incorporated by reference herein in their entireties.

BACKGROUND 1. Technical Field

The present invention relates to a physical quantity sensor, a physicalquantity sensor device, an electronic apparatus, and a vehicle.

2. Related Art

Known acceleration sensors capable of detecting acceleration (a physicalquantity) are described in JP-A-2007-139505 and JP-A-2010-238921.

The acceleration sensor of JP-A-2007-139505 includes a substrate, amovable member, a first movable electrode section, a second movableelectrode section, a first stationary electrode section, and a secondstationary electrode section, wherein the movable member can bedisplaced in an X-axis direction (a first direction along a detectionaxis) with respect to the substrate, the first movable electrode sectionand the second movable electrode section are provided to the movablemember and are arranged side by side in a Y-axis direction (a seconddirection perpendicular to the first direction), and the firststationary electrode section and the second stationary electrode sectionare fixed to the substrate and are arranged side by side in the Y-axisdirection. Further, the first stationary electrode section has firststationary electrode fingers extending toward the negative side in theY-axis direction, and the second stationary electrode section has secondstationary electrode fingers extending toward the positive side in theY-axis direction. Further, the first movable electrode section has firstmovable electrode fingers extending from the movable member toward thepositive side in the Y-axis direction, and opposing the first stationaryelectrode fingers in the X-axis direction, and the second movableelectrode section has second movable electrode fingers extending fromthe movable member toward the negative side in the Y-axis direction, andopposing the second stationary fingers in the X-axis direction.

The acceleration sensor of JP-A-2010-238921 includes a substrate, amovable member, a first movable electrode section, a second movableelectrode section, a first stationary electrode section, and a secondstationary electrode section, wherein the movable member can bedisplaced in a first direction along a detection axis with respect tothe substrate, the first movable electrode section and the secondmovable electrode section are provided to the movable member and arearranged side by side in the first direction, and the first stationaryelectrode section and the second stationary electrode section are fixedto the substrate and are arranged side by side in the first direction.Further, the first stationary electrode section has a plurality of firststationary electrode fingers extending toward both sides in a seconddirection perpendicular to the first direction, and the secondstationary electrode section has a plurality of second stationaryelectrode fingers extending toward both sides in the second direction.Further, the first movable electrode section has first movable electrodefingers extending from the movable member toward both sides in thesecond direction, and opposing the first stationary electrode fingers inthe first direction, and the second movable electrode section has secondmovable electrode fingers extending from the movable member toward bothsides in the second direction, and opposing the second stationaryfingers in the first direction.

However, in the acceleration sensors described in JP-A-2007-139505 andJP-A-2010-238921, there is a problem that all of the first and secondstationary electrode fingers and the first and second movable electrodefingers are elongated, and therefore easily damaged (easily broken) dueto an impact or the like.

SUMMARY

An advantage of the invention is to provide a physical quantity sensor,a physical quantity sensor device, an electronic apparatus and a vehiclehaving electrode fingers that are hard break, and have excellent impactresistance.

The invention can be implemented in the following configurationexamples.

A physical quantity sensor according to an aspect of the inventionincludes a base, and an sensor element provided to the base, anddetecting a physical quantity, the sensor element includes a stationaryelectrode fixed to the base, a movable member which can be displaced ina first direction as a detection axis direction of the physical quantitywith respect to the base, and a movable electrode provided to themovable member, the stationary electrode includes a first stationaryelectrode and a second stationary electrode arranged side by side in thesecond direction which is a direction crossing the detection axis, thefirst stationary electrode includes a first trunk, and a plurality offirst stationary electrode fingers extending from the first trunk towardboth sides in the second direction, the second stationary electrodeincludes a second trunk, and a plurality of second stationary electrodefingers extending from the second trunk toward both sides in the seconddirection, the movable electrode includes a first movable electrode anda second movable electrode arranged side by side in the seconddirection, at least a part of the first movable electrode includes aplurality of first movable electrode fingers located on both sides inthe second direction of the first trunk, and opposed to the firststationary electrode fingers in the first direction, and at least a partof the second movable electrode includes a plurality of second movableelectrode fingers located on both sides in the second direction of thesecond trunk, and opposed to the second stationary electrode fingers inthe first direction.

With this configuration, it is possible to shorten each of the first andsecond stationary electrode fingers and the first and second movableelectrode fingers. Therefore, a physical quantity sensor, which haselectrode fingers that are hard to damage, and has excellent impactresistance, is obtained.

In the physical quantity sensor according to the aspect of theinvention, it is preferable that the first trunk and the second trunkextend in a tilted direction with respect to each of the first directionand the second direction.

With this configuration, it is possible to form shorter electrodefingers.

In the physical quantity sensor according to the aspect of theinvention, it is preferable that the first trunk and the second trunkare tilted toward respective sides opposite to each other with respectto the first direction.

With this configuration, it is possible to dispose the bonding surfaceof the movable member on the base, the bonding surface of the firststationary electrode on the base, and the bonding surface of the secondstationary electrode on the base closer to each other. Therefore,deflection of the base has minimal impact, and it is possible to detectthe physical quantity with higher accuracy.

In the physical quantity sensor according to the aspect of theinvention, it is preferable that the plurality of first stationaryelectrode fingers is disposed side by side in the first direction, thelengths along the second direction of the plurality of first stationaryelectrode fingers located on one side in the second direction of thefirst trunk and disposed side by side in the first direction descend(decrease) toward one side in the first direction, the lengths along thesecond direction of the plurality of first stationary electrode fingerslocated on the other side in the second direction of the first trunk anddisposed side by side in the first direction ascend (increase) towardthe one side in the first direction, the plurality of second stationaryelectrode fingers is disposed side by side in the first direction, thelengths along the second direction of the plurality of second stationaryelectrode fingers located on the one side in the second direction of thesecond trunk and disposed side by side in the first direction ascend(increase) toward the one side in the first direction, and the lengthsalong the second direction of the plurality of second stationaryelectrode fingers located on the other side in the second direction ofthe second trunk and disposed side by side in the first directiondescend (decrease) toward the one side in the first direction.

With this configuration, it is possible to more effectively avoid damagedue to an impact or the like in the plurality of first and secondstationary electrode fingers.

In the physical quantity sensor according to the aspect of theinvention, it is preferable that the plurality of first movableelectrode fingers is disposed side by side in the first direction, thelengths along the second direction of the plurality of first movableelectrode fingers located on one side in the second direction of thefirst trunk and disposed side by side in the first direction descendtoward one side in the first direction, the lengths along the seconddirection of the plurality of first movable electrode fingers located onthe other side in the second direction of the first trunk and disposedside by side in the first direction ascend toward the one side in thefirst direction, the plurality of second movable electrode fingers isdisposed side by side in the first direction, the lengths along thesecond direction of the plurality of second movable electrode fingerslocated on the one side in the second direction of the second trunk anddisposed side by side in the first direction ascend toward the one sidein the first direction, and the lengths along the second direction ofthe plurality of second movable electrode fingers located on the otherside in the second direction of the second trunk and disposed side byside in the first direction descend toward the one side in the firstdirection.

With this configuration, it is possible to more effectively avoid damagedue to an impact or the like in the plurality of first and secondmovable electrode fingers.

In the physical quantity sensor according to the aspect of theinvention, it is preferable that each of the first movable electrodefingers is located on one side in the first direction with respect to apaired one of the first stationary electrode fingers, and each of thesecond movable electrode fingers is located on the other side in thefirst direction with respect to a paired one of the second stationaryelectrode fingers.

Therefore, it is possible to perform a differential calculation on afirst detection signal obtained between the first stationary electrodefingers and the first movable electrode fingers, and a second detectionsignal obtained between the second stationary electrode fingers and thesecond movable electrode fingers. As such, it is possible to cancelnoise, and thus, it is possible to detect the physical quantity withhigher accuracy.

In the physical quantity sensor according to the aspect of theinvention, it is preferable that there are further included a movablemember support adapted to support the movable member, and fixed to thebase, a first trunk support adapted to support the first trunk, andfixed to the base, and a second trunk support adapted to support thesecond trunk, and fixed to the base, and a bonding surface of themovable member support bonded to the base, a bonding surface of thefirst trunk support bonded to the base, and a bonding surface of thesecond trunk support bonded to the base are disposed side by side in thesecond direction.

With this configuration, it is possible to dispose the bonding surfaceof the movable member support bonded to the base, the bonding surface ofthe first trunk support bonded to the base, and the bonding surface ofthe second trunk support bonded to the base closer to each other.Therefore, deflection of the base has minimal impact, and it is possibleto detect the physical quantity with higher accuracy.

In the physical quantity sensor according to the aspect of theinvention, it is preferable that the movable member support is locatedbetween the first stationary electrode and the second stationaryelectrode.

With this configuration, it is possible to more stably support themovable member.

In the physical quantity sensor according to the aspect of theinvention, it is preferable that there are further included a firstconnector adapted to connect the first trunk and the first trunk supportto each other, and a second connector adapted to connect the secondtrunk and the second trunk support to each other, the first connector islocated on an opposite side to the movable member support side of thefirst trunk support, and the second connector is located on an oppositeside to the movable member support side of the second trunk support.

With this configuration, it is possible to dispose the bonding surfaceof the movable member support bonded to the base, the bonding surface ofthe first trunk support bonded to the base, and the bonding surface ofthe second trunk support bonded to the base closer to each other.Therefore, deflection of the base has minimal impact, and it is possibleto detect the physical quantity with higher accuracy.

In the physical quantity sensor according to the aspect of theinvention, it is preferable that the movable member has a frame shapesurrounding the stationary electrode.

With this configuration, it is possible to further increase the mass ofthe movable member. Therefore, the physical quantity can be detectedwith higher accuracy.

A physical quantity sensor device according to an aspect of theinvention includes the physical quantity sensor according to any one ofthe aspects of the invention described above.

With this configuration, it is possible to appreciate the advantages ofthe physical quantity sensor described above, and it is possible toobtain the physical quantity sensor device high in reliability.

An electronic apparatus according to an aspect of the invention includesthe physical quantity sensor according to any one of the aspects of theinvention described above.

With this configuration, it is possible to appreciate the advantages ofthe physical quantity sensor described above, and it is possible toobtain the electronic apparatus high in reliability.

A vehicle according to an aspect of the invention includes the physicalquantity sensor according to any one of the aspects of the inventiondescribed above.

With this configuration, it is possible to appreciate the advantages ofthe physical quantity sensor described above, and it is possible toobtain the vehicle high in reliability.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will be described with reference to theaccompanying drawings, wherein like numbers reference like elements.

FIG. 1 is a plan view showing a physical quantity sensor according to afirst embodiment of the invention.

FIG. 2 is a cross-sectional view along the line A-A in FIG. 1.

FIG. 3 is a plan view showing a physical quantity sensor according to asecond embodiment of the invention.

FIG. 4 is a plan view showing a physical quantity sensor according to athird embodiment of the invention.

FIG. 5 is a plan view showing a physical quantity sensor according to afourth embodiment of the invention.

FIG. 6 is a plan view showing a modified example of the physicalquantity sensor shown in FIG. 5.

FIG. 7 is a plan view showing a physical quantity sensor according to afifth embodiment of the invention.

FIG. 8 is a plan view showing a physical quantity sensor according to asixth embodiment of the invention.

FIG. 9 is a plan view showing a physical quantity sensor according to aseventh embodiment of the invention.

FIG. 10 is a cross-sectional view along the line B-B in FIG. 9.

FIG. 11 is a plan view showing a physical quantity sensor according toan eighth embodiment of the invention.

FIG. 12 is a plan view showing a physical quantity sensor according to aninth embodiment of the invention.

FIG. 13 is a plan view showing a physical quantity sensor according to atenth embodiment of the invention.

FIG. 14 is a plan view showing a physical quantity sensor according toan eleventh embodiment of the invention.

FIG. 15 is a plan view showing a physical quantity sensor according to atwelfth embodiment of the invention.

FIG. 16 is a plan view showing a physical quantity sensor according to athirteenth embodiment of the invention.

FIG. 17 is a cross-sectional view showing a physical quantity sensordevice according to a fourteenth embodiment of the invention.

FIG. 18 is a perspective view showing an electronic apparatus accordingto a fifteenth embodiment of the invention.

FIG. 19 is a perspective view showing an electronic apparatus accordingto a sixteenth embodiment of the invention.

FIG. 20 is a perspective view showing an electronic apparatus accordingto a seventeenth embodiment of the invention.

FIG. 21 is a perspective view showing a vehicle according to aneighteenth embodiment of the invention.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Hereinafter, a physical quantity sensor, a physical quantity sensordevice, an electronic apparatus and a vehicle according to the inventionwill be described in detail based on the embodiments shown in theaccompanying drawings.

First Embodiment

Firstly, a physical quantity sensor according to a first embodiment ofthe invention will be described.

FIG. 1 is a plan view showing the physical quantity sensor according tothe first embodiment of the invention. FIG. 2 is a cross-sectional viewalong the line A-A in FIG. 1. It should be noted that the front side ofthe sheet in FIG. 1 and the upper side in FIG. 2 are also referred to as“upper side,” and the back side of the sheet in FIG. 1 and the lowerside in FIG. 2 are also referred to as “lower side” in the followingdescriptions for the sake of convenience of explanation. Further, asshown in each of the drawings, the three axes perpendicular to eachother are defined as an X axis, a Y axis, and a Z axis, and a directionparallel to the X axis is also referred to as an “X-axis direction,” adirection parallel to the Y axis is also referred to as a “Y-axisdirection,” and a direction parallel to the Z axis is also referred toas a “Z-axis direction.” Further, the tip side in the arrow direction ofeach of the axes is also referred to as a “positive side,” and theopposite side is also referred to as a “negative side.”

The physical quantity sensor 1 shown in FIG. 1 is an acceleration sensorcapable of detecting the acceleration Ax in the X-axis direction. Such aphysical quantity sensor 1 has a base 2, and a sensor element 3, whichis provided to the base 2 and detects the acceleration Ax (the physicalquantity) in the X-axis direction. Further, the sensor element 3 has astationary electrode 4, a movable member 52, and a movable electrode 6,wherein the stationary electrode 4 is attached to the base 2, themovable member 52 can be displaced in the X-axis direction (a firstdirection as the detection axis direction of the physical quantity) withrespect to the base 2, and the movable electrode 6 is provided to themovable member 52. Further, the stationary electrode 4 has a firststationary electrode 41 and a second stationary electrode 42 arrangedside by side along the Y-axis direction (a second direction as adirection crossing (“perpendicular to” in the present embodiment) thedetection axis). Further, the first stationary electrode 41 has a firsttrunk 411 (e.g., a suspension beam), and a plurality of first stationaryelectrode fingers 412 disposed on both sides in the Y-axis direction (asecond direction) of the first trunk 411, and being longitudinallyextended in the second direction. Further, the second stationaryelectrode 42 has a second trunk 421, and a plurality of secondstationary electrode fingers 422 disposed on both sides in the Y-axisdirection (the second direction) from the second trunk 421, and beinglongitudinally extended in the second direction. Further, the movableelectrode 6 has a first movable electrode 61 and a second movableelectrode 62 arranged side by side along the Y-axis direction (thesecond direction). Further, at least a part of the first movableelectrode 61 has a plurality of first movable electrode fingers 611located on both sides in the Y-axis direction (the second direction) ofthe first trunk 411, and opposed to the first stationary electrodefingers 412 in the X-axis direction (the first direction) beinglongitudinally extended in the second direction. Further, at least apart of the second movable electrode 62 has a plurality of secondmovable electrode fingers 621 located on both sides in the Y-axisdirection (the second direction) of the second trunk 421, and opposed tothe second stationary electrode fingers 422 in the X-axis direction (thefirst direction) being longitudinally extended in the second direction.By adopting such a configuration, it is possible to shorten the firstand second stationary electrode fingers 412, 422 and the first andsecond movable electrode fingers 611, 621 while keeping the capacitancebetween the first movable electrode fingers 611 and the first stationaryelectrode fingers 412 and the capacitance between the second movableelectrode fingers 621 and the second stationary electrode fingers 422sufficiently high. Therefore, the physical quantity sensor 1 isobtained, which has the electrode fingers 412, 422, 611, 621 that arehard to damage, and has excellent impact resistance. Such a physicalquantity sensor 1 will hereinafter be described in detail.

As shown in FIG. 1, the physical quantity sensor 1 has the base 2, thesensor element 3, and a lid 8 bonded to the base 2 so as to cover thesensor element 3.

Base

As shown in FIG. 1, the base 2 has a rectangular plate shape. Further,the base 2 has a recess 21 opening on the upper surface side. Further,in the planar shape viewed from the Z-axis direction, the recess 21 isformed to be larger than the sensor element 3 so as to accommodate thesensor element 3 inside. The recess 21 functions as a clearance forpreventing the sensor element 3 and the base 2 from having contact witheach other.

Further, as shown in FIG. 2, the base 2 has three projecting mounts(posts or pedestals) 22, 23, 24 on the bottom surface of the recess 21.Further, the first stationary electrode 41 is bonded to the mount 22,the second stationary electrode 42 is bonded to the mount 23, and themovable member support 51 is bonded to the mount 24.

Further, as shown in FIG. 1, the base 2 has grooves 25, 26, 27 openingon the upper surface side. Further, one end of each of the grooves 25,26, 27 is located outside the lid 8, and the other end thereof isconnected to the recess 21.

As such a base 2 as described above, it is possible to use a glasssubstrate formed of a glass material (borosilicate glass such as Pyrexglass) including, for example, alkali metal ions (movable ions). Thus,it is possible to bond the base 2 and the lid 8 to each other withanodic bonding, and it is possible to firmly bond them to each otherdepending on the constituent material of the lid 8. Further, since thebase 2 having a light transmissive property can be obtained, it ispossible to view the state of the sensor element 3 via the base 2 fromthe outside of the physical quantity sensor 1.

It should be noted that the base 2 is not limited to the glasssubstrate, but it is also possible to use, for example, a siliconsubstrate or a ceramic substrate. It should be noted that in the case ofusing the silicon substrate, from the viewpoint of preventing a shortcircuit, it is preferable to use a highly-resistive silicon substrate,or to use a silicon substrate provided with a silicon oxide film (aninsulating oxide) formed on the surface using thermal oxidation or thelike.

Further, as shown in FIG. 1, the grooves 25, 26, 27 are respectivelyprovided with interconnections 71, 72, 73. Further, one end of theinterconnection 71 in the groove 25 is exposed to the outside of the lid8, and functions as a terminal for achieving electrical connection to anexternal device. Further, as shown in FIG. 2, the other end of theinterconnection 71 is laid up to the mount 22 via the recess 21.Further, the interconnection 71 is electrically connected to the firststationary electrode 41 on the mount 22.

Further, as shown in FIG. 1, one end of the interconnection 72 in thegroove 26 is exposed to the outside of the lid 8, and functions as aterminal for achieving electrical connection to the external device.Further, as shown in FIG. 2, the other end of the interconnection 72 islaid up to the mount 23 via the recess 21. Further, the interconnection72 is electrically connected to the second stationary electrode 42 onthe mount 23.

Further, as shown in FIG. 1, one end of the interconnection 73 in thegroove 27 is exposed to the outside of the lid 8, and functions as aterminal for achieving electrical connection to the external device.Further, as shown in FIG. 2, the other end of the interconnection 73 islaid up to the mount 24 via the recess 21. Further, the interconnection73 is electrically connected to the movable member support 51 on themount 24.

The interconnections 71, 72, 73 are not particularly limited, but therecan be cited a metal material such as gold (Au), silver (Ag), platinum(Pt), palladium (Pd), iridium (Ir), copper (Cu), aluminum (Al), nickel(Ni), titanium (Ti), or tungsten (W), alloys including any of thesemetal materials, and a transparent conductive material of the oxidegroup such as indium tin oxide (ITO), indium zinc oxide (IZO), ZnO, orIGZO, and it is possible to use one of these materials or two or morethereof in combination (e.g., as a stacked body formed of two or morelayers).

Lid

As shown in FIG. 1, the lid 8 has a rectangular plate shape. Further, asshown in FIG. 2, the lid 8 has a recess 81 opening on the lower surfaceside. Further, the lid 8 is bonded to the base 2 so as to house thesensor element 3 in the recess 81. Further, the lid 8 and the base 2form a housing space S for housing the sensor element 3.

Further, as shown in FIG. 2, the lid 8 has a communication hole 82 forallowing communication between the inside and the outside of the housingspace S, and it is possible to replace the atmosphere in the housingspace S with desired atmosphere via the communication hole 82. Further,a sealing member 83 is disposed in the communication hole 82, and thesealing member 83 seals the communication hole 82.

The sealing member 83 is not particularly limited providing thecommunication hole 82 can be sealed, there can be used, for example, avariety of types of alloys such as a gold (Au)/tin (Sn) group alloy, agold (Au)/germanium (Ge) group alloy, or a gold (Au)/aluminum (Al) groupalloy, a glass material such as low-melting-point glass, and so on.

It is preferable for the housing space S to be filled with an inert gassuch as nitrogen, helium, or argon, and provided with roughlyatmospheric pressure at the operating temperature (in a range of −40° C.through 80° C.). By providing the atmospheric pressure to the housingspace S, the viscous resistance increases to exert a damping effect, andit is possible to promptly converge (stop) the vibration of the movablemember 52. Therefore, the detection accuracy of the acceleration Ax ofthe physical quantity sensor 1 is improved.

The lid 8 is formed of a silicon substrate in the present embodiment. Itshould be noted that the lid 8 is not limited to the silicon substrate,but it is also possible to use, for example, a glass substrate or aceramic substrate. Further, the bonding method of the base 2 and the lid8 is not particularly limited, but can appropriately be selected inaccordance with the materials of the base 2 and the lid 8. However,there can be cited, for example, anodic bonding, activation bonding forbonding the bonding surfaces activated by irradiation with plasma,bonding with a bonding material such as glass frit, and diffusionbonding for bonding metal films deposited on the upper surface of thebase 2 and the lower surface of the lid 8 to each other.

As shown in FIG. 2, in the present embodiment, the base 2 and the lid 8are bonded to each other via glass frit (low-melting-point glass) as anexample of the bonding material. In the state of overlapping the base 2and the lid 8 with each other, the inside and the outside of the housingspace S can communicate with each other via the grooves 25, 26, 27.However, by using the glass frit 89, it is possible to bond the base 2and the lid 8 to each other, and at the same time seal the grooves 25,26, 27, and thus, it is possible to more easily airtightly seal thehousing space S. It should be noted that in the case of bonding the base2 and the lid 8 to each other using anodic bonding or the like (thebonding method unable to seal the grooves 25, 26, 27), the grooves 25,26, 27 can be blocked with an SiO₂ film formed by, for example, the CVDmethod using tetraethoxysilane (TEOS).

Sensor Element

As shown in FIG. 1, the sensor element 3 has the stationary electrode 4,the movable member support 51, the movable member 52, springs 53, 54,and a movable electrode 6, wherein the stationary electrode 4 is fixedto the base 2, the movable member support 51 is fixed to the base 2, themovable member 52 can be replaced in the X-axis direction with respectto the movable member support 51, the springs 53, 54 connect the movablemember support 51 and the movable member 52 to each other, and themovable electrode 6 is provided to the movable member 52. Among these,the movable member support 51, the movable member 52, the springs 53,54, and the movable electrode 6 are formed integrally. Such a sensorelement 3 can be formed by, for example, patterning the siliconsubstrate doped with impurities such as phosphorus (P) or boron (B).Further, the sensor element 3 is bonded to the base 2 (the mounts 22,23, 24) with anodic bonding. However, the material of the sensor element3 and the bonding method of the sensor element 3 to the base 2 are notparticularly limited.

As shown in FIG. 1, the movable member support 51 (support beam) has anelongated shape extending in the X-axis direction. Further, the movablemember support 51 has a bonding surface 511 at the end on the negativeside in the X-axis direction, wherein the bonding surface 511 is bondedto the mount 24. It should be noted that in the present embodiment, themovable member support 51 has an elongated shape extending in the X-axisdirection, but the shape of the movable member support 51 is notparticularly limited providing the function can be obtained. Further, inthe following description, an imaginary axis dividing the movable membersupport 51 into two equal parts in the Y-axis direction in a plan viewviewed from the Z-axis direction is defined as a central axis L.

Such a movable member support 51 is located between the first stationaryelectrode 41 and the second stationary electrode 42. Thus, it ispossible to dispose the movable member support 51 in a central part ofthe movable member 52, and thus it is possible to more stably supportthe movable member 52.

As shown in FIG. 1, the movable member 52 includes a frame having aframe shape in the plan view viewed from the Z-direction, and surroundsthe movable member support 51, the springs 53, 54, and the first andsecond stationary electrodes 41, 42. In other words, the movable member52 includes the frame having the frame shape surrounding the stationaryelectrode 4. Thus, it is possible to further increase the mass of themovable member 52. Therefore, it is possible to further improve thesensitivity to thereby detect the physical quantity with high accuracy.

Further, the movable member 52 has a first opening 528 (a first cutout)and a second opening 529 (a second cutout), wherein the first stationaryelectrode 41 is disposed inside the first opening 528, and the secondstationary electrode 42 is disposed inside the second opening 529.Further, the first and second openings 528, 529 are arranged side byside in the Y-axis direction. Such a movable member 52 is symmetricalabout the central axis L.

In the more specific description of the shape of the movable member 52,the movable member 52 a frame 521, a first Y-axis extending cross bar522, a first X-axis extending return arm 523, a second Y-axis extendingcross bar 524, and a second X-axis extending return arm 525, wherein theframe 521 surrounds the movable member support 51, the springs 53, 54,and the first and second stationary electrodes 41, 42, the first Y-axisextending cross bar 522 is located on the positive side in the X-axisdirection of the first opening 528 and extends from the frame 521 towardthe negative side in the Y-axis direction, the first X-axis extendingreturn arm 523 extends from a tip of the first Y-axis extending crossbar 522, the second Y-axis extending cross bar 524 is located on thepositive side in the X-axis direction of the second opening 529 andextends from the frame 521 toward the positive side in the Y-axisdirection, and the second X-axis extending return arm 525 extends from atip of the second Y-axis extending cross bar 524 toward the negativeside in the X-axis direction. Further, the first and second Y-axisextending cross bars 522, 524 are each disposed in the vicinity of thespring 53, and are each arranged along the Y-axis direction (theextending direction of a spring element 531) of the spring 53, and thefirst and second X-axis extending return arms 523, 525 are each disposedin the vicinity of the movable member support 51 and are each arrangedalong the movable member support 51.

In such a configuration, the first Y-axis extending cross bar 522 andthe first X-axis extending return arm 523 function as a support forsupporting the first movable electrode fingers 611, and the secondY-axis extending cross bar 524 and the second X-axis extending returnarm 525 function as a support for supporting the second movableelectrode fingers 621.

Further, the movable member 52 has a first tab 526 projecting from theframe 521 toward the inside of the first opening 528 so as to fill inthe excess space of the first opening 528, and has a second tab 527projecting from the frame 521 toward the inside of the second opening529 so as to fill in the excess space of the second opening 529. Byproviding the first and second tabs 526, 527 as described above, it ispossible to make the mass of the movable member 52 larger withoutincreasing the size of the movable member 52. Therefore, the sensitivityis improved, and the physical quantity sensor 1 high in sensitivity isobtained.

Further, the springs 53, 54 are elastically deformable, and by thesprings 53, 54 deforming elastically, it is possible to displace themovable member 52 in the X-axis direction with respect to the movablemember support 51. As shown in FIG. 1, the spring 53 connects an end onthe positive side in the X-axis direction of the movable member 52 andan end on the positive side in the X-axis direction of the movablemember support 51 to each other, and the spring 54 connects an end onthe negative side in the X-axis direction of the movable member 52 andan end on the negative side in the X-axis direction of the movablemember support 51 to each other. Thus, it is possible to support themovable member 52 on both sides in the X-axis direction, and therefore,the posture and the behavior of the movable member 52 are stabilized.Therefore, it is possible to reduce unwanted vibrations to therebydetect the acceleration Ax with higher accuracy.

Further, the spring 53 has a pair of spring elements 531, 532 arrangedside by side in the Y-axis direction. Further, the pair of springelements 531, 532 each have a shape meandering in the Y-axis direction,and are formed symmetrically about the central axis L. Such a spring 53has a part 53 y extending longer in the Y-axis direction and a part 53 xextending shorter in the X-axis direction. It should be noted that theconfiguration of the spring 54 is substantially the same as theconfiguration of the spring 53.

By forming the springs 53, 54 to have a shape longer in the Y-axisdirection perpendicular to the X-axis direction as the detection axisthan in the X-axis direction as described above, it is possible toreduce the displacement (in particular the rotational displacementaround the Z axis) in a direction other than the X-axis direction (thedetection axis direction) of the movable member 52 when the accelerationAx is applied. Therefore, it is possible to reduce the unwantedvibrations to thereby detect the acceleration Ax with higher accuracy.It should be noted that the configuration of the springs 53, 54 is notparticularly limited providing the function thereof can be obtained.

Further, as shown in FIG. 1, the stationary electrode 4 has the firststationary electrode 41 located in the first opening 528, and the secondstationary electrode 42 located in the second opening 529. These firstand second stationary electrodes 41, 42 are arranged side by side in theY-axis direction.

Further, the first stationary electrode 41 has a first trunk support413, the first trunk 411, and the plurality of first stationaryelectrode fingers 412, wherein the first trunk support 413 is fixed tothe base 2, the first trunk 411 is supported by the first trunk support413, and the plurality of first stationary electrode fingers 412 extendsfrom the first trunk 411 toward both sides in the Y-axis direction. Itshould be noted that the first trunk support 413, the first trunk 411,and the first stationary electrode fingers 412 are formed integrally.

Further, the first trunk support 413 has a bonding surface 413 a bondedto the mount 22. It should be noted that the bonding surface 413 a isdisposed so as to be biased toward the negative side in the X-axisdirection of the first trunk support 413.

Further, the first trunk 411 has an elongated rod shape, and has one endconnected to the first trunk support 413, and is thus supported by thefirst trunk support 413. Further, the first trunk 411 is longitudinallyextended in a tilted direction with respect to each of the X axis andthe Y axis in a plan view viewed from the Z-axis direction. Morespecifically, the first trunk 411 is tilted so that the separationdistance from the central axis L increases toward the tip side thereof.By adopting such an arrangement, it becomes easy to dispose the firsttrunk support 413 in the vicinity of the movable member support 51.

It should be noted that the tilt of the axis L411 of the first trunk 411with respect to the X axis is not particularly limited, but ispreferably no smaller than 10° and no larger than 45°, and is morepreferably no smaller than 10° and no larger than 30°. Thus, it ispossible to reduce the spread of the first stationary electrode 41 inthe Y-axis direction, and thus, it is possible to achieve the reductionin size of the sensor element 3.

Further, the first stationary electrode fingers 412 extend from thefirst trunk 411 toward both sides in the Y-axis direction. Specifically,the first stationary electrode fingers 412 have the first stationaryelectrode fingers 412′ located on the positive side in the Y-axisdirection of the first trunk 411, and the first stationary electrodefingers 412″ located on the negative side in the Y-axis direction.Further, the plurality of first stationary electrode fingers 412′ andthe plurality of first stationary electrode fingers 412″ are eachdisposed along the X-axis direction at intervals.

Further, the lengths (the lengths in the Y-axis direction) of the firststationary electrode fingers 412′ descend toward the positive side inthe X-axis direction. Further, the tips of the first stationaryelectrode fingers 412′ are located on the same straight line along theX-axis direction. In contrast, the lengths (the lengths in the Y-axisdirection) of the first stationary electrode fingers 412″ ascend towardthe positive side in the X-axis direction. Further, the tips of thefirst stationary electrode fingers 412″ are located on the same straightline along the X-axis direction. Further, the total length of the firststationary electrode finger 412′ and the first stationary electrodefinger 412″ arranged side by side in the Y-axis direction is roughly thesame.

Further, the second stationary electrode 42 has a second trunk support423, the second trunk 421, and the plurality of second stationaryelectrode fingers 422, wherein the second trunk support 423 is fixed tothe base 2, the second trunk 421 is supported by the second trunksupport 423, and the plurality of second stationary electrode fingers422 extends from the second trunk 421 toward both sides in the Y-axisdirection. It should be noted that the second trunk support 423, thesecond trunk 421, and the second stationary electrode fingers 422 areformed integrally.

Further, the second trunk support 423 has a bonding surface 423 a bondedto the upper surface of the mount 23. It should be noted that thebonding surface 423 a is disposed so as to be biased toward the negativeside in the X-axis direction of the second trunk support 423.

Further, the second trunk 421 has an elongated rod shape, and has oneend connected to the second trunk support 423, and is thus supported bythe second trunk support 423. Further, the second trunk 421 islongitudinally extended in a tilted direction with respect to each ofthe X axis and the Y axis in the plan view viewed from the Z-axisdirection. More specifically, the second trunk 421 is tilted so that theseparation distance from the central axis L increases toward the tipside thereof. By adopting such an arrangement, it becomes easy todispose the second trunk support 423 in the vicinity of the movablemember support 51.

It should be noted that the tilt of the axis L421 of the second trunk421 with respect to the X axis is not particularly limited, but ispreferably no smaller than 10° and no larger than 45°, and is morepreferably no smaller than 10° and no larger than 30°. Thus, it ispossible to reduce the spread of the second stationary electrode 42 inthe Y-axis direction, and thus, it is possible to achieve the reductionin size of the sensor element 3.

Further, the second stationary electrode fingers 422 extend from thesecond trunk 421 toward both sides in the Y-axis direction. In otherwords, the second stationary electrode fingers 422 have the secondstationary electrode fingers 422′ located on the positive side in theY-axis direction of the second trunk 421, and the second stationaryelectrode fingers 422″ located on the negative side in the Y-axisdirection. Further, the plurality of second stationary electrode fingers422′ and the plurality of second stationary electrode fingers 422″ areeach disposed along the X-axis direction at intervals.

Further, the lengths (the lengths in the Y-axis direction) of the secondstationary electrode fingers 422′ ascend toward the positive side in theX-axis direction. Further, the tips of the second stationary electrodefingers 422′ are located on the same straight line along the X-axisdirection. In contrast, the lengths (the lengths in the Y-axisdirection) of the second stationary electrode fingers 422″ descendtoward the positive side in the X-axis direction. Further, the tips ofthe second stationary electrode fingers 422″ are located on the samestraight line along the X-axis direction. Further, the total length ofthe second stationary electrode finger 422′ and the second stationaryelectrode finger 422″ arranged side by side in the Y-axis direction isroughly the same.

The first stationary electrode 41 and the second stationary electrode 42are hereinabove described. The shapes and the arrangement of such firstand second stationary electrodes 41, 42 are line-symmetric about thecentral axis L (except the fact that the first stationary electrodefingers 412 and the second stationary electrode fingers 422 are shiftedfrom each other in the X-axis direction). In particular in the presentembodiment, the first and second trunks 411, 421 each extend in thetilted direction with respect to the X axis so that the separationdistance from the central axis L gradually increases toward the tipside. By adopting such an arrangement, it is possible to dispose thebonding surface 413 aof the first trunk support 413 and the bondingsurface 423 aof the second trunk support 423 closer to the bondingsurface 511 of the movable member support 51. Therefore, it is possibleto more effectively reduce the difference in displacement in the Z-axisdirection between the movable member 52 and the stationary electrode 4occurring when warpage or deflection occurs in the base 2 due to heat,residual stress, or the like, specifically the difference indisplacement in the Z-axis direction between the first movable electrodefingers 611 and the first stationary electrode fingers 412, and thedifference in displacement in the Z-axis direction between the secondmovable electrode fingers 621 and the second stationary electrodefingers 422.

In particular in the present embodiment, the bonding surface 413 a ofthe first trunk support 413, the bonding surface 423 a of the secondtrunk support 423, and the bonding surface 511 of the movable membersupport 51 are arranged side by side in the Y-axis direction. Thus, itis possible to dispose the bonding surfaces 413 a, 423 a closer to thebonding surface 511, and thus the advantage described above becomes morepronounced.

Further, as shown in FIG. 1, the movable electrode 6 has the firstmovable electrode 61 located in the first opening 528, and the secondmovable electrode 62 located in the second opening 529. These first andsecond movable electrodes 61, 62 are arranged side by side in the Y-axisdirection.

Further, the first movable electrode 61 has the plurality of firstmovable electrode fingers 611 located on both sides in the Y-axisdirection of the first trunk 411, and extending in the Y-axis direction.Specifically, the first movable electrode fingers 611 have the firstmovable electrode fingers 611′ located on the positive side in theY-axis direction of the first trunk 411, and the first movable electrodefingers 611″ located on the negative side in the Y-axis direction.Further, the plurality of first movable electrode fingers 611′ and theplurality of first movable electrode fingers 611″ are each disposedalong the X-axis direction at intervals. Further, the first movableelectrode fingers 611′ extend from the frame 521 toward the negativeside in the Y-axis direction, and the first movable electrode fingers611″ extend from the first X-axis extending return arm 523 toward thepositive side in the Y-axis direction.

Further, each of the first movable electrode fingers 611 is located onthe positive side in the X-axis direction with respect to correspondingone of the first stationary electrode fingers 412, and is opposed tothis first stationary electrode finger 412 with a gap.

Further, the lengths (the lengths in the Y-axis direction) of the firstmovable electrode fingers 611′ descend toward the positive side in theX-axis direction. Further, the tips of the first movable electrodefingers 611′ are located on the same straight line along the extendingdirection of the first trunk 411. In contrast, the lengths (the lengthsin the Y-axis direction) of the first movable electrode fingers 611″ascend toward the positive side in the X-axis direction. Further, thetips of the first movable electrode fingers 611″ are located on the samestraight line along the extending direction of the first trunk 411.Further, the total length of the first movable electrode finger 611′ andthe first movable electrode finger 611″ arranged side by side in theY-axis direction is roughly the same.

Further, the second movable electrode 62 has the plurality of secondmovable electrode fingers 621 located on both sides in the Y-axisdirection of the second trunk 421, and extending in the Y-axisdirection. Specifically, the second movable electrode fingers 621 havethe second movable electrode fingers 621′ located on the positive sidein the Y-axis direction of the second trunk 421, and the second movableelectrode fingers 621″ located on the negative side in the Y-axisdirection. Further, the plurality of second movable electrode fingers621′ and the plurality of second movable electrode fingers 621″ are eachdisposed along the X-axis direction at intervals. Further, the secondmovable electrode fingers 621′ extend from the second X-axis extendingreturn arm 525 toward the negative side in the Y-axis direction, and thesecond movable electrode fingers 621″ extend from the frame 521 towardthe positive side in the Y-axis direction.

Further, each of the second movable electrode fingers 621 is located onthe negative side in the X-axis direction with respect to correspondingone of the second stationary electrode fingers 422, and is opposed tothis second stationary electrode finger 422 with a gap.

Further, the lengths (the lengths in the Y-axis direction) of the secondmovable electrode fingers 621′ ascend toward the positive side in theX-axis direction. Further, the tips of the second movable electrodefingers 621′ are located on the same straight line along the extendingdirection of the second trunk 421. In contrast, the lengths (the lengthsin the Y-axis direction) of the second stationary electrode fingers 621″descend toward the positive side in the X-axis direction. Further, thetips of the second movable electrode fingers 621″ are located on thesame straight line along the extending direction of the second trunk421. Further, the total length of the second movable electrode finger621′ and the second movable electrode finger 621″ arranged side by sidein the Y-axis direction is roughly the same.

The first movable electrode 61 and the second movable electrode 62 arehereinabove described. The shapes and the arrangement of such first andsecond stationary electrodes 61, 62 are line-symmetric about the centralaxis L (except the fact that the first movable electrode fingers 611 andthe second movable electrode fingers 621 are shifted from each other inthe X-axis direction).

The configuration of the physical quantity sensor 1 is hereinabovedescribed in detail. When the acceleration Ax is applied to such aphysical quantity sensor 1, the movable member 52 is displaced in theX-axis direction while elastically deforming the springs 53, 54 based onthe magnitude of the acceleration Ax. Due to such a displacement, thegap between the first movable electrode finger 611 and the firststationary electrode 412, and the gap between the second movableelectrode finger 621 and the second stationary electrode finger 422 eachvary, and due to the displacement, the capacitance between the firstmovable electrode finger 611 and the first stationary electrode finger412, and the capacitance between the second movable electrode finger 621and the second stationary electrode finger 422 each vary. Therefore, itis possible to detect the acceleration Ax based on the variation inthese capacitances.

Here, as described above, each of the first movable electrode fingers611 is located on the positive side in the X-axis direction with respectto corresponding one of the first stationary electrode fingers 412, andin contrast, each of the second movable electrode fingers 621 is locatedon the negative side in the X-axis direction with respect tocorresponding one of the second stationary electrode fingers 422. Inother words, each of the first movable electrode fingers 611 is locatedon one side in the X-axis direction (the first direction) with respectto a paired one of the first stationary electrode fingers 412, and eachof the second movable electrode fingers 621 is located on the other sidein the X-axis direction (the first direction) with respect to a pairedone of the second stationary electrode fingers 422. Therefore, when theacceleration Ax is applied, the gap between the first movable electrodefinger 611 and the first stationary electrode finger 412 contracts andthe gap between the second movable electrode finger 621 and the secondstationary electrode finger 422 expands, or in contrast, the gap betweenthe first movable electrode finger 611 and the first stationaryelectrode finger 412 expands and the gap between the second movableelectrode finger 621 and the second stationary electrode finger 422contracts. Therefore, by performing a differential calculation on afirst detection signal obtained between the first stationary electrodefingers 412 and the first movable electrode fingers 611, and a seconddetection signal obtained between the second stationary electrodefingers 422 and the second movable electrode fingers 621, it is possibleto cancel noise, and thus, the acceleration Ax can be detected withhigher accuracy.

As described above, such a physical quantity sensor 1 as described abovehas the plurality of first stationary electrode fingers 412 extendingfrom the first trunk 411 toward both sides in the Y-axis direction (thesecond direction), the plurality of second stationary electrode fingers422 extending from the second trunk 421 toward both sides in the Y-axisdirection (the second direction), the plurality of first movableelectrode fingers 611 located on both sides in the Y-axis direction (thesecond direction) of the first trunk 411 and opposed to the firststationary electrode fingers 412 in the X-axis direction (the firstdirection), and the plurality of second movable electrode fingers 621located on both sides in the Y-axis direction (the second direction) ofthe second trunk 421 and opposed to the second stationary electrodefingers 422 in the X-axis direction (the first direction). By adoptingsuch a configuration, it is possible to shorten the length of each ofthe electrode fingers 412, 422, 611, 621 while forming the sufficientlyhigh capacitances respectively between the first stationary electrodefingers 412 and the first movable electrode fingers 611, and between thesecond stationary electrode fingers 422 and the second movable electrodefingers 621. Therefore, there is provided the physical quantity sensor 1which is capable of exhibiting excellent detection accuracy, and isreduced in damage of the electrode fingers 412, 422, 611, 621, and iscapable of exhibiting excellent impact resistance. Further, the damageof the electrode fingers 412, 422, 611, 621 is reduced, the thickness ofthe electrode fingers 412, 422, 611, 621 can be reduced accordingly, andreduction in size and an increase in sensitivity of the physicalquantity sensor 1 can be achieved.

Further, in the physical quantity sensor 1, the first trunk 411 and thesecond trunk 421 each extend in a tilted direction with respect to theX-axis direction (the first direction) and the Y-axis direction (thesecond direction). Thus, it is possible to include the shorter firststationary electrode fingers 412 in the plurality of first stationaryelectrode fingers 412, and it becomes harder to damage the firststationary electrode 41 as a whole. Similarly, it is possible to includethe shorter second stationary electrode fingers 422 in the plurality ofsecond stationary electrode fingers 422, and it becomes harder to damagethe second stationary electrode 42 as a whole. The same applies to thefirst movable electrode fingers 611 and the second movable electrodefingers 621. Therefore, the physical quantity sensor 1 is obtained, inwhich the damage of the electrode fingers 412, 422, 611, 621 is moreeffectively reduced, and which has more excellent impact resistance.

Further, in the physical quantity sensor 1, the first trunk 411 and thesecond trunk 421 are tilted toward the respective sides opposite to eachother with respect to the X-axis direction (the first direction). Thus,it is possible to dispose the bonding surface 413 a of the first trunksupport 413 and the bonding surface 423 a of the second trunk support423 closer to the bonding surface 511 of the movable member support 51.Therefore, it is possible to more effectively reduce the difference indisplacement in the Z-axis direction between the movable member 52 andthe stationary electrode 4 when the warpage or the deflection occurs inthe base 2 due to the heat. As a result, for example, the variation inthe detection characteristic due to the environmental temperaturebecomes small, and thus, the physical quantity sensor 1 excellent intemperature characteristic is obtained.

In particular in the present embodiment, there are provided the movablemember support 51, the first trunk support 413, and the second trunksupport 423, wherein the movable member support 51 is fixed to the base2, the first trunk support 413 supports the first trunk 411 and is fixedto the base 2, and the second trunk support 423 supports the secondtrunk 421, and the bonding surface 511 of the movable member support 51with the base 2, the bonding surface 413 a of the first trunk support413 with the base 2, and the bonding surface 423 a of the second trunksupport 423 are arranged side by side in the Y-axis direction (thesecond direction).

Therefore, it is possible to dispose the bonding surface 413 a and thebonding surface 423 a closer to the bonding surface 511.

Therefore, it is possible to more effectively reduce the difference indisplacement in the Z-axis direction between the movable member 52 andthe stationary electrode 4 when the warpage or the deflection occurs inthe base 2 due to the heat, the residual stress, or the like. As aresult, for example, the variation in the detection characteristic dueto the environmental temperature becomes smaller, and thus, the physicalquantity sensor 1 more excellent in temperature characteristic isobtained.

Further, in the present embodiment, the plurality of first stationaryelectrode fingers 412 is arranged side by side in the X-axis direction(the first direction). Further, the lengths along the Y-axis directionof the first stationary electrode fingers 412′, which are located on thepositive side (one side) in the Y-axis direction (the second direction)with respect to the first trunk 411, and are disposed side by side inthe X-axis direction, descend toward the positive side (the one side) inthe X-axis direction, and in contrast, the lengths along the Y-axisdirection of the first stationary electrode fingers 412″, which arelocated on the negative side (the other side) in the Y-axis directionwith respect to the first trunk 411, and are disposed side by side inthe X-axis direction, ascend toward the positive side in the X-axisdirection. Thus, it is possible to decrease the proportion of theelongated (longer in the Y-axis direction) first stationary electrodefingers 412 to the plurality of first stationary electrode fingers 412,and therefore, the first stationary electrode fingers 412 become hard todamage as a whole accordingly. Therefore, it is possible to moreeffectively avoid damage of the first stationary electrode fingers 412due to an impact or the like.

Meanwhile, the plurality of second stationary electrode fingers 422 isdisposed side by side in the X-axis direction. Further, the lengthsalong the Y-axis direction of the second stationary electrode fingers422′, which are located on the positive side in the Y-axis directionwith respect to the second trunk 421, and are disposed side by side inthe X-axis direction, ascend toward the positive side in the X-axisdirection, and the lengths along the Y-axis direction of the secondstationary electrode fingers 422″, which are located on the negativeside in the Y-axis direction with respect to the second trunk 421, andare disposed side by side in the X-axis direction, descend toward thepositive side in the X-axis direction. Thus, it is possible to decreasethe proportion of the elongated (longer in the Y-axis direction) secondstationary electrode fingers 422 to the plurality of second stationaryelectrode fingers 422, and therefore, the second stationary electrodefingers 422 become hard to damage as a whole accordingly. Therefore, itis possible to more effectively avoid damage of the second stationaryelectrode fingers 422 due to an impact or the like.

Further, in the present embodiment, the plurality of first movableelectrode fingers 611 is arranged side by side in the X-axis direction(the first direction). Further, the lengths along the Y-axis directionof the first movable electrode fingers 611′, which are located on thepositive side (one side) in the Y-axis direction (the second direction)with respect to the first trunk 411, and are disposed side by side inthe X-axis direction, descend toward the positive side (the one side) inthe X-axis direction, and the lengths along the Y-axis direction of thefirst movable electrode fingers 611″, which are located on the negativeside (the other side) in the Y-axis direction with respect to the firsttrunk 411, and are disposed side by side in the X-axis direction, ascendtoward the positive side in the X-axis direction. Thus, it is possibleto decrease the proportion of the elongated (longer in the Y-axisdirection) first movable electrode fingers 611 to the plurality of firstmovable electrode fingers 611, and therefore, the first movableelectrode fingers 611 become hard to damage as a whole accordingly.Therefore, it is possible to more effectively avoid damage of the firstmovable electrode fingers 611 due to an impact or the like.

Meanwhile, the plurality of second movable electrode fingers 621 isdisposed side by side in the X-axis direction. Further, the lengthsalong the Y-axis direction of the second movable electrode fingers 621′,which are located on the positive side in the Y-axis direction withrespect to the second trunk 421, and are disposed side by side in theX-axis direction, ascend toward the positive side in the X-axisdirection, and the lengths along the Y-axis direction of the secondmovable electrode fingers 621″, which are located on the negative sidein the Y-axis direction with respect to the second trunk 421, and aredisposed side by side in the X-axis direction, descend toward the oneside in the X-axis direction. Thus, it is possible to decrease theproportion of the elongated (longer in the Y-axis direction) secondmovable electrode fingers 621 to the plurality of second movableelectrode fingers 621, and therefore, the second movable electrodefingers 621 become hard to damage as a whole accordingly. Therefore, itis possible to more effectively avoid damage of the second movableelectrode fingers 621 due to an impact or the like.

Second Embodiment

Next, a physical quantity sensor according to a second embodiment of theinvention will be described.

FIG. 3 is a plan view showing the physical quantity sensor according tothe second embodiment of the invention. It should be noted that in FIG.3, the base and the lid are omitted from the drawing, and the sensorelement alone is shown for the sake of convenience of explanation.

The physical quantity sensor 1 according to the present embodiment issubstantially the same as the physical quantity sensor 1 according tothe first embodiment described above except mainly the fact that theconfiguration of the sensor element 3 is different.

It should be noted that in the following description, the physicalquantity sensor 1 according to the second embodiment will be describedwith a focus on the difference from the first embodiment describedabove, and the description of substantially the same issues will beomitted. Further, in FIG. 3, the constituents substantially the same asthose of the first embodiment described above are denoted by the samereference symbols.

As shown in FIG. 3, in the physical quantity sensor 1 according to thepresent embodiment, the first trunk 411 and the second trunk 421 eachextend along the X-axis direction. Further, the lengths of the firststationary electrode fingers 412 are made roughly equal to each other,and similarly, the lengths of the second stationary electrode fingers422 are made roughly equal to each other. Further, the lengths of thefirst movable electrode fingers 611 are made roughly equal to eachother, and similarly, the lengths of the second movable electrodefingers 621 are made roughly equal to each other.

According also to such a second embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be obtained.

Third Embodiment

Next, a physical quantity sensor according to a third embodiment of theinvention will be described.

FIG. 4 is a plan view showing the physical quantity sensor according tothe third embodiment of the invention. It should be noted that in FIG.4, the base and the lid are omitted from the drawing, and the sensorelement alone is shown for the sake of convenience of explanation.

The physical quantity sensor 1 according to the present embodiment issubstantially the same as the physical quantity sensor 1 according tothe second embodiment described above except mainly the fact that theconfiguration of the sensor element 3 is different.

It should be noted that in the following description, the physicalquantity sensor 1 according to the third embodiment will be describedwith a focus on the difference from the second embodiment describedabove, and the description of substantially the same issues will beomitted. Further, in FIG. 4, the constituents substantially the same asthose of the second embodiment described above are denoted by the samereference symbols.

As shown in FIG. 4, the first stationary electrode 41 further includes afirst connector 414 for connecting the first trunk support 413 and thefirst trunk 411 to each other. Further, the first connector 414 islocated on the opposite side to the movable member support 51 withrespect to the first trunk support 413. Further, the first connector 414extends in the Y-axis direction, and is connected to an end on thenegative side in the X-axis direction of the first trunk 411.

Similarly, the second stationary electrode 42 further includes a secondconnector 424 for connecting the second trunk support 423 and the secondtrunk 421 to each other. Further, the second connector 424 is located onthe opposite side to the movable member support 51 with respect to thesecond trunk support 423. Further, the second connector 424 extends inthe Y-axis direction, and is connected to an end on the negative side inthe X-axis direction of the second trunk 421.

According to such a configuration, since the first connector 414 and thesecond connector 424 are provided, it is possible to dispose the bondingsurface 413 a of the first trunk support 413 and the bonding surface 423a of the second trunk support 423 closer to the bonding surface 511 ofthe movable member support 51. Therefore, it is possible to effectivelyreduce the difference in displacement in the Z-axis direction betweenthe movable member 52 and the stationary electrode 4 occurring whenwarpage or deflection occurs in the base 2 due to heat, residual stress,or the like, specifically the difference in displacement in the Z-axisdirection between the first movable electrode fingers 611 and the firststationary electrode fingers 412, and the difference in displacement inthe Z-axis direction between the second movable electrode fingers 621and the second stationary electrode fingers 422. Therefore, the physicalquantity can be detected with higher accuracy.

According also to such a third embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be obtained.

Fourth Embodiment

Next, a physical quantity sensor according to a fourth embodiment of theinvention will be described.

FIG. 5 is a plan view showing the physical quantity sensor according tothe fourth embodiment of the invention. FIG. 6 is a plan view showing amodified example of the physical quantity sensor shown in FIG. 5. Itshould be noted that in each of FIG. 5 and FIG. 6, the base and the lidare omitted from the drawing, and the sensor element alone is shown forthe sake of convenience of explanation.

The physical quantity sensor 1 according to the present embodiment issubstantially the same as the physical quantity sensor 1 according tothe first embodiment described above except mainly the fact that theconfiguration of the sensor element 3 is different.

It should be noted that in the following description, the physicalquantity sensor 1 according to the fourth embodiment will be describedwith a focus on the difference from the first embodiment describedabove, and the description of substantially the same issues will beomitted. Further, in FIG. 5 and FIG. 6, the constituents substantiallythe same as those of the first embodiment described above are denoted bythe same reference symbols.

As shown in FIG. 5, the first stationary electrode 41 has a pair offirst trunks 411 each extending in a tilted direction with respect toeach of the X axis and the Y axis. Further, the pair of first trunks 411are located on respective sides opposite to each other in the X-axisdirection with respect to the first trunk support 413. Specifically, oneof the first trunks 411 extends from the first trunk support 413 towardthe positive side in the X-axis direction along the tilted directionwith respect to the X axis, and the other of the first trunks 411extends from the first trunk support 413 toward the negative side in theX-axis direction along the tilted direction with respect to the X-axisdirection. Further, the pair of first trunks 411 are made line-symmetricabout a line parallel to the Y axis. Further, the plurality of firststationary electrode fingers 412 is provided to each of the first trunks411, and the movable member 52 is provided with the plurality of firstmovable electrode fingers 611 respectively opposed to the firststationary electrode fingers 412.

Similarly, the second stationary electrode 42 has a pair of secondtrunks 421 each extending in a tilted direction with respect to each ofthe X axis and the Y axis. Further, the pair of second trunks 421 arelocated on respective sides opposite to each other in the X-axisdirection with respect to the second trunk support 423. Specifically,one of the second trunks 421 extends from the second trunk support 423toward the positive side in the X-axis direction along the tilteddirection with respect to the X axis, and the other of the second trunks421 extends from the second trunk support 423 toward the negative sidein the X-axis direction along the tilted direction with respect to theX-axis direction. Further, the pair of second trunks 421 are madeline-symmetric about a line parallel to the Y axis. Further, theplurality of second stationary electrode fingers 422 is provided to eachof the second trunks 421, and the movable member 52 is provided with theplurality of second movable electrode fingers 621 respectively opposedto the second stationary electrode fingers 422.

According to such a configuration as described above, the number of thefirst and second stationary electrode fingers 412, 422 and the first andsecond movable electrode fingers 611, 621 can be increased compared to,for example, the first embodiment described above. Therefore, forexample, if the lengths of the electrode fingers are equal to those inthe first embodiment described above, it is possible to increase thecapacitance between the first movable electrode fingers 611 and thefirst stationary electrode fingers 412 and the capacitance between thesecond movable electrode fingers 621 and the second stationary electrodefingers 422. Further, since the variation in capacitance when theacceleration Ax is applied also increases accordingly, the sensitivityis improved, and the acceleration Ax can be detected with higheraccuracy. In another respect, for example, if the value of thecapacitance is the same as in the first embodiment described above, theelectrode fingers 412, 422, 611, 621 can be shortened accordingly, andthus, the electrode fingers 412, 422, 611, 621 become harder to bedamaged.

Further, the bonding surfaces 511 of the movable member support 51 withthe base 2 are located in the central part in the X-axis direction ofthe movable member support 51. Further, the bonding surfaces 511 aredisposed at two places in the central part of the movable member support51 across the centroid thereof from each other. By adopting such anarrangement, it is possible to dispose the bonding surface 413 a of thefirst stationary electrode 41 with the base 2 and the bonding surface423 a of the second stationary electrode 42 with the base 2 close to therespective bonding surfaces 511. Therefore, it is possible to moreeffectively reduce the difference in displacement in the Z-axisdirection between the movable member 52 and the stationary electrode 4when the warpage or the deflection occurs in the base 2 due to the heat,the residual stress, or the like.

It should be noted that the arrangement of the bonding surfaces 511 isnot particularly limited, but it is also possible to dispose the bondingsurface 511 at one place overlapping the centroid of the movable membersupport 51 as shown, for example, in FIG. 6. Further, a part of themovable member support 51 located between the two bonding surfaces 511is not necessarily required to form one part, but can also be divided.It is also possible to connect the first X-axis extending return arm 523and the second X-axis extending return arm 525 to each other in a gapformed by the division.

According also to such a fourth embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be obtained.

Fifth Embodiment

Next, a physical quantity sensor according to a fifth embodiment of theinvention will be described.

FIG. 7 is a plan view showing the physical quantity sensor according tothe fifth embodiment of the invention. It should be noted that in FIG.7, the base and the lid are omitted from the drawing, and the sensorelement alone is shown for the sake of convenience of explanation.

The physical quantity sensor 1 according to the present embodiment issubstantially the same as the physical quantity sensor 1 according tothe third embodiment described above except mainly the fact that theconfiguration of the sensor element 3 is different.

It should be noted that in the following description, the physicalquantity sensor 1 according to the fifth embodiment will be describedwith a focus on the difference from the third embodiment describedabove, and the description of substantially the same issues will beomitted. Further, in FIG. 7, the constituents substantially the same asthose of the first embodiment described above are denoted by the samereference symbols.

As shown in FIG. 7, the first stationary electrode 41 includes the firstconnector 414 for connecting the first trunk support 413 and the firsttrunk 411 to each other. Further, the first connector 414 is located onthe opposite side to the movable member support 51 with respect to thefirst trunk support 413. Further, the first connector 414 extends in theY-axis direction, and is connected to a central part in the X-axisdirection of the first trunk 411. Further, the first stationaryelectrode fingers 412 are disposed on each of one end side (the positiveside in the X-axis direction) and the other end side (the negative sidein the X-axis direction) of the first trunk 411. Therefore, the firststationary electrode fingers 412 are disposed throughout roughly theentire area in the extending direction except the connection part withthe first connector 414.

Similarly, the second stationary electrode 42 includes the secondconnector 424 for connecting the second trunk support 423 and the secondtrunk 421 to each other. Further, the second connector 424 is located onthe opposite side to the movable member support 51 with respect to thesecond trunk support 423. Further, the second connector 424 extends inthe Y-axis direction, and is connected to a central part in the X-axisdirection of the second trunk 421. Further, the second stationaryelectrode fingers 422 are disposed on each of one end side (the positiveside in the X-axis direction) and the other end side (the negative sidein the X-axis direction) of the second trunk 421. Therefore, the secondstationary electrode fingers 422 are disposed throughout roughly theentire area in the extending direction except the connection part withthe second connector 424.

According to such a configuration, since the first connector 414 and thesecond connector 424 are provided, it is possible to dispose the bondingsurface 413 a of the first trunk support 413 and the bonding surface 423a of the second trunk support 423 closer to the bonding surface 511 ofthe movable member support 51. Therefore, it is possible to effectivelyreduce the difference in displacement in the Z-axis direction betweenthe movable member 52 and the stationary electrode 4 occurring whenwarpage or deflection occurs in the base 2 due to the heat, the residualstress, or the like, specifically the difference in displacement in theZ-axis direction between the first movable electrode fingers 611 and thefirst stationary electrode fingers 412, and the difference indisplacement in the Z-axis direction between the second movableelectrode fingers 621 and the second stationary electrode fingers 422.Therefore, the physical quantity can be detected with higher accuracy.

Further, the number of the first and second stationary electrode fingers412, 422 and the first and second movable electrode fingers 611, 621 canbe increased compared to, for example, the second embodiment describedabove. Therefore, for example, if the lengths of the electrode fingersare equal to those in the first embodiment described above, it ispossible to increase the capacitance between the first movable electrodefingers 611 and the first stationary electrode fingers 412 and thecapacitance between the second movable electrode fingers 621 and thesecond stationary electrode fingers 422, and thus, the sensitivity isimproved, and it is possible to detect the acceleration Ax with higheraccuracy. In another respect, for example, if the value of thecapacitance is the same as in the first embodiment described above, theelectrode fingers 412, 422, 611, 621 can be shortened accordingly, andthus, the electrode fingers 412, 422, 611, 621 become harder to bedamaged.

Further, the bonding surfaces 511 of the movable member support 51 withthe base 2 are located in the central part in the X-axis direction ofthe movable member support 51. Further, the bonding surfaces 511 aredisposed at two places (the two places arranged in the X-axis direction)in the central part of the movable member support 51 across the centroidthereof from each other. By adopting such an arrangement, it is possibleto dispose the bonding surface 413 a of the first stationary electrode41 with the base 2 and the bonding surface 423 a of the secondstationary electrode 42 with the base 2 close to the respective bondingsurfaces 511. Therefore, it is possible to more effectively reduce thedifference in displacement in the Z-axis direction between the movablemember 52 and the stationary electrode 4 when the warpage or thedeflection occurs in the base 2 due to the heat, the residual stress, orthe like.

It should be noted that a part of the movable member support 51 locatedbetween the two bonding surfaces 511 is not required to form one part,but can also be divided. Further, it is also possible to connect thefirst X-axis extending return arm 523 and the second X-axis extendingreturn arm to each other in a gap formed by the division.

According also to such a fifth embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be obtained.

Sixth Embodiment

Next, a physical quantity sensor according to a sixth embodiment of theinvention will be described.

FIG. 8 is a plan view showing the physical quantity sensor according tothe sixth embodiment of the invention. It should be noted that in FIG.8, the base and the lid are omitted from the drawing, and the sensorelement alone is shown for the sake of convenience of explanation.

The physical quantity sensor 1 according to the present embodiment issubstantially the same as the physical quantity sensor 1 according tothe second embodiment described above except mainly the fact that theconfiguration of the sensor element 3 is different.

It should be noted that in the following description, the physicalquantity sensor 1 according to the sixth embodiment will be describedwith a focus on the difference from the second embodiment describedabove, and the description of substantially the same issues will beomitted. Further, in FIG. 8, the constituents substantially the same asthose of the first embodiment described above are denoted by the samereference symbols.

As shown in FIG. 8, the first stationary electrode 41 has a pair offirst trunks 411 each extending along the X-axis direction. Further, thepair of first trunks 411 are located on respective sides opposite toeach other in the X-axis direction with respect to the first trunksupport 413. Specifically, one of the first trunks 411 extends from thefirst trunk support 413 toward the positive side in the X-axisdirection, and the other of the first trunks 411 extends from the firsttrunk support 413 toward the negative side in the X-axis direction.Further, the plurality of stationary electrode fingers 412 is providedto each of the first trunks 411, and the movable member 52 is providedwith the plurality of first movable electrode fingers 611 respectivelyopposed to the first stationary electrode fingers 412.

Similarly, the second stationary electrode 42 has a pair of secondtrunks 421 each extending along the X-axis direction. Further, the pairof second trunks 421 are located on respective sides opposite to eachother in the X-axis direction with respect to the second trunk support423. Specifically, one of the second trunks 421 extends from the secondtrunk support 423 toward the positive side in the X-axis direction, andthe other of the second trunks 421 extends from the second trunk support423 toward the negative side in the X-axis direction. Further, theplurality of second stationary electrode fingers 422 is provided to eachof the second trunks 421, and the movable member 52 is provided with theplurality of second movable electrode fingers 621 respectively opposedto the second stationary electrode fingers 422.

According to such a configuration as described above, the number of thefirst and second stationary electrode fingers 412, 422 and the first andsecond movable electrode fingers 611, 621 can be increased compared to,for example, the second embodiment described above. Therefore, forexample, if the lengths of the electrode fingers are equal to those inthe first embodiment described above, it is possible to increase thecapacitance between the first movable electrode fingers 611 and thefirst stationary electrode fingers 412 and the capacitance between thesecond movable electrode fingers 621 and the second stationary electrodefingers 422. Further, since the variation in capacitance when theacceleration Ax is applied also increases accordingly, the sensitivityis improved, and the acceleration Ax can be detected with higheraccuracy. In another respect, for example, if the value of thecapacitance is the same as in the first embodiment described above, theelectrode fingers 412, 422, 611, 621 can be shortened accordingly, andthus, the electrode fingers 412, 422, 611, 621 become harder to bedamaged.

Further, the bonding surfaces 511 of the movable member support 51 withthe base 2 are located in the central part in the X-axis direction ofthe movable member support 51. Further, the bonding surfaces 511 aredisposed at two places (the two places arranged in the Y-axis direction)in the central part of the movable member support 51 across the centroidthereof from each other. By adopting such an arrangement, it is possibleto dispose the bonding surface 413 a of the first stationary electrode41 with the base 2 and the bonding surface 423 a of the secondstationary electrode 42 with the base 2 close to the respective bondingsurfaces 511. Therefore, it is possible to more effectively reduce thedifference in displacement in the Z-axis direction between the movablemember 52 and the stationary electrode 4 when the warpage or thedeflection occurs in the base 2 due to the heat, the residual stress, orthe like.

According also to such a sixth embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be obtained.

Seventh Embodiment

Next, a physical quantity sensor according to a seventh embodiment ofthe invention will be described.

FIG. 9 is a plan view showing the physical quantity sensor according tothe seventh embodiment of the invention. FIG. 10 is a cross-sectionalview along the line B-B in FIG. 9. It should be noted that in FIG. 9,the base and the lid are omitted from the drawing, and the sensorelement alone is shown for the sake of convenience of explanation.

The physical quantity sensor 1 according to the present embodiment issubstantially the same as the physical quantity sensor 1 according tothe first embodiment described above except mainly the fact that theconfiguration of the sensor element 3 is different.

It should be noted that in the following description, the physicalquantity sensor 1 according to the seventh embodiment will be describedwith a focus on the difference from the first embodiment describedabove, and the description of substantially the same issues will beomitted. Further, in each of FIG. 9 and FIG. 10, the constituentssubstantially the same as those of the first embodiment described aboveare denoted by the same reference symbols.

As shown in FIG. 9, a pair of stationary electrodes 4 are disposed sideby side in the X-axis direction. Further, the pair of stationaryelectrodes 4 are line-symmetric about a line parallel to the Y axis.Further, each of the stationary electrodes 4 is provided with a trunksupport 43 having the first trunk support 413 and the second trunksupport 423 integrated with each other. Further, each of the trunksupports 43 is located on the central axis L in the plan view viewedfrom the Z-axis direction. According to such a configuration asdescribed above, since the first trunk support 413 and the second trunksupport 423 are integrated with each other, it is possible to achieveminiaturization of the physical quantity sensor 1.

Further, in the stationary electrode 4 located on the positive side inthe X-axis direction, the first and second trunks 411, 421 are locatedon the positive side in the X-axis direction with respect to the trunksupport 43, and in the stationary electrode 4 located on the negativeside in the X-axis direction, the first and second trunks 411, 421 arelocated on the negative side in the X-axis direction with respect to thetrunk support 43. Therefore, it is possible to dispose the pair of trunksupports 43 close to each other.

It should be noted that as shown in FIG. 10, one of the trunk supports43 has a bonding surface 431 with the mount 22, and is electricallyconnected to the interconnection 71. Further, the other of the trunksupports 43 has a bonding surface 431 with the mount 23, and iselectrically connected to the interconnection 72.

Here, in the stationary electrode 4 located on the positive side in theX-axis direction, each of the first movable electrode fingers 611 andeach of the second movable electrode fingers 621 are located on thepositive side in the X-axis direction with respect to corresponding oneof the first stationary electrode fingers 412 and corresponding one ofthe second stationary electrode fingers 422. In contrast, in thestationary electrode 4 located on the negative side in the X-axisdirection, each of the first movable electrode fingers 611 and each ofthe second movable electrode fingers 621 are located on the negativeside in the X-axis direction with respect to corresponding one of thefirst stationary electrode fingers 412 and corresponding one of thesecond stationary electrode fingers 422. Thus, by performing thedifferential calculation on a first detection signal obtained betweenthe one of the stationary electrodes 4 and the movable electrode 6, anda second detection signal obtained between the other of the stationaryelectrodes 4 and the movable electrode 6, it is possible to cancel thenoise, and thus, the acceleration Ax can be detected with higheraccuracy.

Further, the movable member support 51 is located between the two trunksupports 43, and extends in the Y-axis direction. Further, in themovable member support 51, the spring 53 is connected to an end on thepositive side in the Y-axis direction, and the spring 54 is connected toan end on the negative side in the Y-axis direction. By adopting such anarrangement, it is possible to dispose the bonding surface 511 close tothe two trunk supports 43. It should be noted that the configuration andthe arrangement of the movable member support 51 are not particularlylimited.

According also to such a seventh embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be obtained.

Eighth Embodiment

Next, a physical quantity sensor according to an eighth embodiment ofthe invention will be described.

FIG. 11 is a plan view showing the physical quantity sensor according tothe eighth embodiment of the invention. It should be noted that in FIG.11, the base and the lid are omitted from the drawing, and the sensorelement alone is shown for the sake of convenience of explanation.

The physical quantity sensor 1 according to the present embodiment issubstantially the same as the physical quantity sensor 1 according tothe seventh embodiment described above except mainly the fact that theconfiguration of the sensor element 3 is different.

It should be noted that in the following description, the physicalquantity sensor 1 according to the eighth embodiment will be describedwith a focus on the difference from the seventh embodiment describedabove, and the description of substantially the same issues will beomitted. Further, in FIG. 11, the constituents substantially the same asthose of the seventh embodiment described above are denoted by the samereference symbols.

As shown in FIG. 11, the movable member support 51 is disposed outsidethe movable member 52. Further, the movable member support 51 has aframe shape, and is disposed so as to surround the movable member 52.Further, the movable member support 51 has a base 512 having a frameshape, and a pair of tabs 513, 514 projecting inward from the base 512.Further, the tabs 513, 514 are disposed symmetrically about the centralaxis L, and each project toward the center of the sensor element 3.Further, the bonding surfaces 511 with the mount 24 are disposed on thetips (ends on the central side) of the tabs 513, 514, respectively.

As described above, since the bonding surfaces 511 are disposed so as tobe shifted toward the central part of the sensor element 3, it ispossible to dispose each of the bonding surfaces 511 close to thebonding surface 413 a of the first trunk support 413 and the bondingsurface 423 a of the second trunk support 423. Therefore, it is possibleto more effectively reduce the difference in displacement in the Z-axisdirection between the movable member 52 and the stationary electrode 4when the warpage or the deflection occurs in the base 2 due to the heat,the residual stress, or the like. Therefore, the physical quantity canbe detected with higher accuracy. In particular in the presentembodiment, since the line segment connecting the pair of bondingsurfaces 511 and the line segment connecting the bonding surfaces 413 a,423 a cross each other, it is possible to dispose the bonding surfaces511, 413 a, 423 a closer to each other, and thus the advantagesdescribed above become more pronounced.

Further, the springs 53, 54 are each located between the movable member52 and the movable member support 51. Further, the spring 53 connects anend on the positive side in the X-axis direction of the movable member52 and an end on the positive side in the X-axis direction of themovable member support 51 to each other, and the spring 54 connects anend on the negative side in the X-axis direction of the movable member52 and an end on the negative side in the X-axis direction of themovable member support 51 to each other. Thus, it is possible to supportthe movable member 52 on both sides in the X-axis direction, andtherefore, the posture and the behavior of the movable member 52 arestabilized. Therefore, it is possible to reduce unwanted vibrations tothereby detect the acceleration Ax with higher accuracy.

According also to such an eighth embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be obtained.

Ninth Embodiment

Next, a physical quantity sensor according to a ninth embodiment of theinvention will be described.

FIG. 12 is a plan view showing the physical quantity sensor according tothe ninth embodiment of the invention. It should be noted that in FIG.12, the base and the lid are omitted from the drawing, and the sensorelement alone is shown for the sake of convenience of explanation.

The physical quantity sensor 1 according to the present embodiment issubstantially the same as the physical quantity sensor 1 according tothe seventh embodiment described above except mainly the fact that theconfiguration of the sensor element 3 is different.

It should be noted that in the following description, the physicalquantity sensor 1 according to the ninth embodiment will be describedwith a focus on the difference from the seventh embodiment describedabove, and the description of substantially the same issues will beomitted. Further, in FIG. 12, the constituents substantially the same asthose of the seventh embodiment described above are denoted by the samereference symbols.

As shown in FIG. 12, the pair of movable member supports 51 are disposedinside the movable member 52. Further, one of the movable membersupports 51 is located on the positive side in the Y-axis direction ofthe central axis L, and the other of the movable member supports 51 islocated on the negative side in the Y-axis direction of the central axisL. Further, the pair of movable member supports 51 are disposedsymmetrically about the central axis L.

Such movable member supports 51 each have a base 515 extending in theX-axis direction, and a tab 516 extending from a central part of thebase 515 toward the center of the sensor element 3, and each form aT-shape. Further, the bonding surfaces 511 with the mount 24 aredisposed on the tips (ends on the central side) of the tabs 516,respectively.

As described above, since the bonding surfaces 511 are disposed so as tobe shifted toward the central part of the sensor element 3, it ispossible to dispose each of the bonding surfaces 511 close to thebonding surface 413 a of the first trunk support 413 and the bondingsurface 423 a of the second trunk support 423. Therefore, it is possibleto more effectively reduce the difference in displacement in the Z-axisdirection between the movable member 52 and the stationary electrode 4when the warpage or the deflection occurs in the base 2 due to the heat,the residual stress, or the like. Therefore, the physical quantity canbe detected with higher accuracy. In particular in the presentembodiment, since the line segment connecting the pair of bondingsurfaces 511 and the line segment connecting the bonding surfaces 413 a,423 a cross each other, it is possible to dispose the bonding surfaces511, 413 a, 423 a closer to each other, and thus the advantagesdescribed above become more pronounced.

Further, a pair of springs 53 are provided. Further, one of the springs53 connects an end on the positive side in the X-axis direction of themovable member 52 and an end (an end on the positive side in the X-axisdirection of the base 515) on the positive side in the X-axis directionof one of the movable member supports 51 to each other, and the other ofthe springs 53 connects an end on the positive side in the X-axisdirection of the movable member 52 and an end (an end on the positiveside in the X-axis direction of the base 515) on the positive side inthe X-axis direction of the other of the movable member supports 51 toeach other.

Similarly, a pair of springs 54 are provided. Further, one of thesprings 54 connects an end on the negative side in the X-axis directionof the movable member 52 and an end (an end on the negative side in theX-axis direction of the base 515) on the negative side in the X-axisdirection of one of the movable member supports 51 to each other, andthe other of the springs 54 connects an end on the negative side in theX-axis direction of the movable member 52 and an end (an end on thenegative side in the X-axis direction of the base 515) on the negativeside in the X-axis direction of the other of the movable member supports51 to each other.

Thus, it is possible to support the movable member 52 with the springs53, 54 on both sides in the X-axis direction, and therefore, the postureand the behavior of the movable member 52 are stabilized. Therefore, itis possible to reduce unwanted vibrations to thereby detect theacceleration Ax with higher accuracy.

According also to such a ninth embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be obtained. In particular in the present embodiment, sincethe movable member 52 has the frame shape, and is located on theoutermost side, the mass of the movable member 52 can be made largercompared to, for example, the eighth embodiment described above.Therefore, the sensitivity is improved, and the physical quantity sensor1 high in sensitivity is obtained.

Tenth Embodiment

Next, a physical quantity sensor according to a tenth embodiment of theinvention will be described.

FIG. 13 is a plan view showing the physical quantity sensor according tothe tenth embodiment of the invention. It should be noted that in FIG.13, the base and the lid are omitted from the drawing, and the sensorelement alone is shown for the sake of convenience of explanation.

The physical quantity sensor 1 according to the present embodiment issubstantially the same as the physical quantity sensor 1 according tothe first embodiment described above except mainly the fact that theconfiguration of the sensor element 3 is different.

It should be noted that in the following description, the physicalquantity sensor 1 according to the tenth embodiment will be describedwith a focus on the difference from the first embodiment describedabove, and the description of substantially the same issues will beomitted. Further, in FIG. 13, the constituents substantially the same asthose of the first embodiment described above are denoted by the samereference symbols.

As shown in FIG. 13, a pair of stationary electrodes 4 are disposed sideby side in the X-axis direction. Further, the pair of stationaryelectrodes 4 are line-symmetric about a line parallel to the Y axis.Further, each of the stationary electrodes 4 is provided with a trunksupport 43 having the first trunk support 413 and the second trunksupport 423 integrated with each other. Further, each of the trunksupports 43 is located on the central axis L in the plan view viewedfrom the Z-axis direction. According to such a configuration asdescribed above, since the first trunk support 413 and the second trunksupport 423 are integrated with each other, it is possible to achieveminiaturization of the physical quantity sensor 1.

It should be noted that similarly to the seventh embodiment describedabove, one of the trunk supports 43 has a bonding surface 431 with themount 22, and is electrically connected to the interconnection 71.Further, the other of the trunk supports 43 has a bonding surface 431with the mount 23, and is electrically connected to the interconnection72.

Further, each of the first stationary electrodes 41 includes a firstconnector 414 for connecting the trunk support 43 and the first trunk411 to each other. Further, the first trunk 411 extends along the X-axisdirection. Further, the first connector 414 extends in the Y-axisdirection, and is connected to an end of the first trunk 411.

Further, each of the second stationary electrodes 42 includes a secondconnector 424 for connecting the trunk support 43 and the second trunk421 to each other. Further, the second trunk 421 extends along theX-axis direction. Further, the second connector 424 extends in theY-axis direction, and is connected to an end of the second trunk 421.

Further, in the stationary electrode 4 located on the positive side inthe X-axis direction, the first and second trunks 411, 421 are locatedon the positive side in the X-axis direction with respect to the trunksupport 43, and in the stationary electrode 4 located on the negativeside in the X-axis direction, the first and second trunks 411, 421 arelocated on the negative side in the X-axis direction with respect to thetrunk support 43. Therefore, it is possible to dispose the pair of trunksupports 43 close to each other.

Here, in the stationary electrode 4 located on the positive side in theX-axis direction, each of the first movable electrode fingers 611 andeach of the second movable electrode fingers 621 are located on thepositive side in the X-axis direction with respect to corresponding oneof the first stationary electrode fingers 412 and corresponding one ofthe second stationary electrode fingers 422. In contrast, in thestationary electrode 4 located on the negative side in the X-axisdirection, each of the first movable electrode fingers 611 and each ofthe second movable electrode fingers 621 are located on the negativeside in the X-axis direction with respect to corresponding one of thefirst stationary electrode fingers 412 and corresponding one of thesecond stationary electrode fingers 422. Thus, by performing thedifferential calculation on a first detection signal obtained betweenthe one of the stationary electrodes 4 and the movable electrode 6, anda second detection signal obtained between the other of the stationaryelectrodes 4 and the movable electrode 6, it is possible to cancel thenoise, and thus, the acceleration Ax can be detected with higheraccuracy.

Further, the movable member support 51 is located between the two trunksupports 43, and extends in the Y-axis direction. Further, in themovable member support 51, the spring 53 is connected to an end on thepositive side in the Y-axis direction, and the spring 54 is connected toan end on the negative side in the Y-axis direction. By adopting such anarrangement, it is possible to dispose the bonding surface 511 close tothe two trunk supports 43. It should be noted that the configuration andthe arrangement of the movable member support 51 are not particularlylimited.

According also to such a tenth embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be obtained.

Eleventh Embodiment

Next, a physical quantity sensor according to an eleventh embodiment ofthe invention will be described.

FIG. 14 is a plan view showing the physical quantity sensor according tothe eleventh embodiment of the invention. It should be noted that inFIG. 14, the base and the lid are omitted from the drawing, and thesensor element alone is shown for the sake of convenience ofexplanation.

The physical quantity sensor 1 according to the present embodiment issubstantially the same as the physical quantity sensor 1 according tothe tenth embodiment described above except mainly the fact that theconfiguration of the sensor element 3 is different.

It should be noted that in the following description, the physicalquantity sensor 1 according to the eleventh embodiment will be describedwith a focus on the difference from the tenth embodiment describedabove, and the description of substantially the same issues will beomitted. Further, in FIG. 14, the constituents substantially the same asthose of the tenth embodiment described above are denoted by the samereference symbols.

As shown in FIG. 14, the movable member support 51 is disposed outsidethe movable member 52. Further, the movable member support 51 has aframe shape, and is disposed so as to surround the movable member 52.Further, the movable member support 51 has a base 512 having a frameshape, and a pair of tabs 513, 514 projecting inward from the base 512.Further, the tabs 513, 514 are disposed symmetrically about the centralaxis L, and each project toward the center of the sensor element 3.Further, the bonding surfaces 511 with the mount 24 are disposed on thetips (ends on the central side) of the tabs 513, 514, respectively.

As described above, since the bonding surfaces 511 are disposed so as tobe shifted toward the central part of the sensor element 3, it ispossible to dispose each of the bonding surfaces 511 close to thebonding surface 413 a of the first trunk support 413 and the bondingsurface 423 a of the second trunk support 423. Therefore, it is possibleto more effectively reduce the difference in displacement in the Z-axisdirection between the movable member 52 and the stationary electrode 4when the warpage or the deflection occurs in the base 2 due to the heat,the residual stress, or the like. Therefore, the physical quantity canbe detected with higher accuracy. In particular in the presentembodiment, since the line segment connecting the pair of bondingsurfaces 511 and the line segment connecting the bonding surfaces 413 a,423 a cross each other, it is possible to dispose the bonding surfaces511, 413 a, 423 a closer to each other, and thus the advantagesdescribed above become more pronounced.

Further, the springs 53, 54 are each located between the movable member52 and the movable member support 51. Further, the spring 53 connects anend on the positive side in the X-axis direction of the movable member52 and an end on the positive side in the X-axis direction of themovable member support 51 to each other, and the spring 54 connects anend on the negative side in the X-axis direction of the movable member52 and an end on the negative side in the X-axis direction of themovable member support 51 to each other. Thus, it is possible to supportthe movable member 52 on both sides in the X-axis direction, andtherefore, the posture and the behavior of the movable member 52 arestabilized. Therefore, it is possible to reduce unwanted vibrations tothereby detect the acceleration Ax with higher accuracy.

According also to such an eleventh embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be obtained.

Twelfth Embodiment

Next, a physical quantity sensor according to a twelfth embodiment ofthe invention will be described.

FIG. 15 is a plan view showing the physical quantity sensor according tothe twelfth embodiment of the invention. It should be noted that in FIG.15, the base and the lid are omitted from the drawing, and the sensorelement alone is shown for the sake of convenience of explanation.

The physical quantity sensor 1 according to the present embodiment issubstantially the same as the physical quantity sensor 1 according tothe tenth embodiment described above except mainly the fact that theconfiguration of the sensor element 3 is different.

It should be noted that in the following description, the physicalquantity sensor 1 according to the twelfth embodiment will be describedwith a focus on the difference from the tenth embodiment describedabove, and the description of substantially the same issues will beomitted. Further, in FIG. 15, the constituents substantially the same asthose of the tenth embodiment described above are denoted by the samereference symbols.

As shown in FIG. 15, the pair of movable member supports 51 are disposedinside the movable member 52. Further, one of the movable membersupports 51 is located on the positive side in the Y-axis direction ofthe central axis L, and the other of the movable member supports 51 islocated on the negative side in the Y-axis direction of the central axisL. Further, the pair of movable member supports 51 are disposedsymmetrically about the central axis L.

Such movable member supports 51 each have a base 515 extending in theX-axis direction, and a tab 516 extending from a central part of thebase 515 toward the center of the sensor element 3, and each form aT-shape. Further, the bonding surfaces 511 with the mount 24 aredisposed on the tips (ends on the central side) of the tabs 516,respectively.

As described above, since the bonding surfaces 511 are disposed so as tobe shifted toward the central part of the sensor element 3, it ispossible to dispose each of the bonding surfaces 511 close to thebonding surface 413 a of the first trunk support 413 and the bondingsurface 423 a of the second trunk support 423. Therefore, it is possibleto more effectively reduce the difference in displacement in the Z-axisdirection between the movable member 52 and the stationary electrode 4when the warpage or the deflection occurs in the base 2 due to the heat,the residual stress, or the like. Therefore, the physical quantity canbe detected with higher accuracy. In particular in the presentembodiment, since the line segment connecting the pair of bondingsurfaces 511 and the line segment connecting the bonding surfaces 413 a,423 a cross each other, it is possible to dispose the bonding surfaces511, 413 a, 423 a closer to each other, and thus the advantagesdescribed above become more pronounced.

Further, a pair of springs 53 are provided. Further, one of the springs53 connects an end on the positive side in the X-axis direction of themovable member 52 and an end (an end on the positive side in the X-axisdirection of the base 515) on the positive side in the X-axis directionof one of the movable member supports 51 to each other, and the other ofthe springs 53 connects an end on the positive side in the X-axisdirection of the movable member 52 and an end (an end on the positiveside in the X-axis direction of the base 515) on the positive side inthe X-axis direction of the other of the movable member supports 51 toeach other.

Similarly, a pair of springs 54 are provided. Further, one of thesprings 54 connects an end on the negative side in the X-axis directionof the movable member 52 and an end (an end on the negative side in theX-axis direction of the base 515) on the negative side in the X-axisdirection of one of the movable member supports 51 to each other, andthe other of the springs 54 connects an end on the negative side in theX-axis direction of the movable member 52 and an end (an end on thenegative side in the X-axis direction of the base 515) on the negativeside in the X-axis direction of the other of the movable member supports51 to each other.

Thus, it is possible to support the movable member 52 with the springs53, 54 on both sides in the X-axis direction, and therefore, the postureand the behavior of the movable member 52 are stabilized. Therefore, itis possible to reduce unwanted vibrations to thereby detect theacceleration Ax with higher accuracy.

According also to such a twelfth embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be obtained. In particular in the present embodiment, sincethe movable member 52 has the frame shape, and is located on theoutermost side, the mass of the movable member 52 can be made largercompared to, for example, the eleventh embodiment described above.Therefore, the sensitivity is improved, and the physical quantity sensor1 high in sensitivity is obtained.

Thirteenth Embodiment

Next, a physical quantity sensor according to a thirteenth embodiment ofthe invention will be described.

FIG. 16 is a plan view showing the physical quantity sensor according tothe thirteenth embodiment of the invention. It should be noted that inFIG. 16, the base and the lid are omitted from the drawing, and thesensor element alone is shown for the sake of convenience ofexplanation.

The physical quantity sensor 1 according to the present embodiment issubstantially the same as the physical quantity sensor 1 according tothe first embodiment described above except mainly the fact that theconfiguration of the sensor element 3 is different.

It should be noted that in the following description, the physicalquantity sensor 1 according to the thirteenth embodiment will bedescribed with a focus on the difference from the first embodimentdescribed above, and the description of substantially the same issueswill be omitted. Further, in FIG. 16, the constituents substantially thesame as those of the first embodiment described above are denoted by thesame reference symbols.

As shown in FIG. 16, the first stationary electrode 41 has a pair offirst trunks 411 disposed side by side in the Y-axis direction. In otherwords, the first trunk 411 has a slit along the longitudinal directionof the first trunk 411, and is divided into two parts (branched into twoparts). Further, the plurality of first stationary electrode fingers 412(412′) extends from the first trunk 411 located on the positive side inthe Y-axis direction toward the positive side in the Y-axis direction,and the plurality of first stationary electrode fingers 412 (412″)extends from the first trunk 411 located on the negative side in theY-axis direction toward the negative side in the Y-axis direction.

Similarly, the second stationary electrode 42 has a pair of secondtrunks 421 disposed side by side in the Y-axis direction. In otherwords, the second trunk 421 has a slit along the longitudinal directionof the second trunk 421, and is divided into two parts (branched intotwo parts). Further, the plurality of second stationary electrodefingers 422 (422′) extends from the second trunk 421 located on thepositive side in the Y-axis direction toward the positive side in theY-axis direction, and the plurality of second stationary electrodefingers 422 (422″) extends from the second trunk 421 located on thenegative side in the Y-axis direction toward the negative side in theY-axis direction.

According also to such a thirteenth embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be obtained. In particular, by providing the plurality offirst trunks 411 and the plurality of second trunks 421, there is anadvantage that the degree of the design freedom of the shapes (thepattern shapes) of the first and second stationary electrodes 41, 42increases.

Fourteenth Embodiment

Next, a physical quantity sensor device according to a fourteenthembodiment of the invention will be described.

FIG. 17 is a cross-sectional view showing the physical quantity sensordevice according to the fourteenth embodiment of the invention.

As shown in FIG. 17, the physical quantity sensor device 1000 has a basesubstrate 1010, the physical quantity sensor 1, a circuit element 1020(IC), bonding wires BW1, bonding wires BW2, and a molded body 1030,wherein the physical quantity sensor 1 is disposed on the base substrate1010, the circuit element 1020 (IC) is disposed on the physical quantitysensor 1, the bonding wires BW1 electrically connect the physicalquantity sensor 1 and the circuit element 1020 to each other, thebonding wires electrically connect the base substrate 1010 and thecircuit element 1020 to each other, and the molded body 1030 includesthe physical quantity sensor 1 and the circuit element 1020 as a mold.Here, as the physical quantity sensor 1, any one of the physicalquantity sensors according to the first through thirteenth embodimentsdescribed above can be used.

The base substrate 1010 is a substrate for supporting the physicalquantity sensor 1, and is, for example, an interposer substrate. On theupper surface of such a base substrate 1010, there is disposed aplurality of connection terminals 1011, and a plurality of mountingterminals is disposed on the lower surface thereof. Further, in the basesubstrate 1010, there are interconnections (not shown), and theconnection terminals 1011 are electrically connected to thecorresponding mounting terminals via the interconnections. The materialof such a base substrate 1010 is not particularly limited, but a siliconsubstrate, a resin substrate, a glass substrate, and a glass-epoxysubstrate, for example, can be used.

Further, the physical quantity sensor 1 is disposed on the basesubstrate 1010 with the base 2 facing downward (toward the basesubstrate 1010 side). Further, the physical quantity sensor 1 is bondedto the base substrate 1010 via a bonding material.

Further, the circuit element 1020 is disposed on the physical quantitysensor 1. Also, the circuit element 1020 is bonded to the lid 8 of thephysical quantity sensor 1 via a bonding material. Additionally, thecircuit element 1020 is electrically connected to the interconnections71, 72, 73 of the physical quantity sensor 1 via the bonding wires BW1,and is electrically connected to the connection terminals 1011 of thebase substrate 1010 via the bonding wires BW2. Such circuit element 1020includes a drive circuit for driving the physical quantity sensor 1, adetection circuit for detecting the acceleration based on the outputsignal from the physical quantity sensor 1, an output circuit forconverting the signal from the detection circuit into a predeterminedsignal to output the result, and so on as needed.

Further, the molded body 1030 includes the physical quantity sensor 1and the circuit element 1020 as a mold. Thus, it is possible to protectthe physical quantity sensor 1 and the circuit element 1020 frommoisture, dusts, impacts, and so on. The molded body 1030 is notparticularly limited, but, for example, thermosetting epoxy resin can beused, and it is possible to form the mold using, for example, a transfermolding method.

The physical quantity sensor device 1000 described above includes thephysical quantity sensor 1. Therefore, it is possible to appreciate theadvantages of the physical quantity sensor 1, and it is possible toobtain the physical quantity sensor device 1000 high in reliability.

It should be noted that the configuration of the physical quantitysensor device 1000 is not limited to the configuration described above,but it is also possible to adopt a configuration in which, for example,the physical quantity sensor 1 is housed in a ceramic package.

Fifteenth Embodiment

Next, an electronic apparatus according to a fifteenth embodiment of theinvention will be described.

FIG. 18 is a perspective view showing the electronic apparatus accordingto the fifteenth embodiment of the invention.

A mobile type (or a laptop type) personal computer 1100 shown in FIG. 18is an application of the electronic apparatus equipped with the physicalquantity sensor according to the invention. In the drawing, the personalcomputer 1100 includes a main body 1104 provided with a keyboard 1102,and a display lid 1106 provided with a display 1108, and the display lid1106 is pivotally supported with respect to the main body 1104 via ahinge structure. Such a personal computer 1100 incorporates the physicalquantity sensor 1 functioning as an acceleration sensor. Here, as thephysical quantity sensor 1, any one of the physical quantity sensorsaccording to the first through thirteenth embodiments described abovecan be used.

Such a personal computer 1100 (the electronic apparatus) has thephysical quantity sensor 1. Therefore, it is possible to appreciate theadvantages of the physical quantity sensor 1 described above, and thehigh reliability can be obtained.

Sixteenth Embodiment

Next, an electronic apparatus according to a sixteenth embodiment of theinvention will be described.

FIG. 19 is a perspective view showing the electronic apparatus accordingto the sixteenth embodiment of the invention.

The cellular phone 1200 (including PHS) shown in FIG. 19 is anapplication of the electronic apparatus equipped with the physicalquantity sensor according to the invention. In this drawing, thecellular phone 1200 is provided with an antenna (not shown), a pluralityof operation buttons 1202, an ear piece 1204, and a mouthpiece 1206, anda display 1208 is disposed between the operation buttons 1202 and theear piece 1204. Such a cellular phone 1200 incorporates the physicalquantity sensor 1 functioning as an acceleration sensor. Here, as thephysical quantity sensor 1, any one of the physical quantity sensorsaccording to the first through thirteenth embodiments described abovecan be used.

Such a cellular phone 1200 (the electronic apparatus) has the physicalquantity sensor 1. Therefore, it is possible to appreciate theadvantages of the physical quantity sensor 1 described above, and thehigh reliability can be obtained.

Seventeenth Embodiment

Next, an electronic apparatus according to a seventeenth embodiment ofthe invention will be described.

FIG. 20 is a perspective view showing the electronic apparatus accordingto the seventeenth embodiment of the invention.

The digital still camera 1300 shown in FIG. 20 is an application of theelectronic apparatus equipped with the physical quantity sensoraccording to the invention. In this drawing, the case (body) 1302 isprovided with a display 1310 disposed on the back surface thereof tohave a configuration of performing display in accordance with theimaging signal from the CCD, wherein the display 1310 functions as aviewfinder for displaying the object as an electronic image. Further,the front surface (the back side in the drawing) of the case 1302 isprovided with a light receiver 1304 including an optical lens (animaging optical system), the CCD, and so on. Then, when the photographerchecks an object image displayed on the display 1310, and then presses ashutter button 1306, the imaging signal from the CCD at that moment istransferred to and stored in a memory 1308. Such a digital still camera1300 incorporates the physical quantity sensor 1 functioning as anacceleration sensor. Here, as the physical quantity sensor 1, any one ofthe physical quantity sensors according to the first through thirteenthembodiments described above can be used.

Such a digital still camera 1300 (the electronic apparatus) includes thephysical quantity sensor 1. Therefore, it is possible to appreciate theadvantages of the physical quantity sensor 1 described above, and thehigh reliability can be obtained.

It should be noted that, as the electronic apparatus according to theinvention, there can be cited, for example, a smartphone, a tabletterminal, a timepiece (including a smart watch), an inkjet ejectiondevice (e.g., an inkjet printer), a laptop personal computer, atelevision set, a wearable terminal such as a head-mounted display(HMD), a video camera, a video cassette recorder, a car navigationsystem, a pager, a personal digital assistance (including one with acommunication function), an electronic dictionary, an electriccalculator, a computerized game machine, a word processor, aworkstation, a video phone, a security video monitor, a pair ofelectronic binoculars, a POS terminal, a medical device (e.g., anelectronic thermometer, an electronic manometer, an electronic bloodsugar meter, an electrocardiogram measurement instrument, anultrasonograph, and an electronic endoscope), a fish detector, a varietyof types of measurement instruments, abase station apparatus for amobile terminal, a variety of types of gauges (e.g., gauges for avehicle, an aircraft, or a ship), a flight simulator, and a net-workserver besides the personal computer and the cellular phone according tothe embodiment described above, and the digital still camera accordingto the embodiment.

Eighteenth Embodiment

Next, a vehicle according to an eighteenth embodiment of the inventionwill be described.

FIG. 21 is a perspective view showing the vehicle according to theeighteenth embodiment of the invention.

The car 1500 shown in FIG. 21 is an application of the vehicle equippedwith the physical quantity sensor according to the invention. In thisdrawing, the car 1500 incorporates the physical quantity sensor 1functioning as the acceleration sensor, and the attitude of a car body1501 can be detected using the physical quantity sensor 1. The detectionsignal of the physical quantity sensor 1 is supplied to a car bodyattitude control device 1502, and it is possible for the car bodyattitude control device 1502 to detect the attitude of the car body 1501based on the detection signal, and to control the stiffness of thesuspension or control the braking of each of wheels 1503 in accordancewith the detection result. Here, as the physical quantity sensor 1, anyone of the physical quantity sensors according to the first throughthirteenth embodiments described above can be used.

Such a car 1500 (the vehicle) has the physical quantity sensor 1.Therefore, it is possible to appreciate the advantages of the physicalquantity sensor 1 described above, and the high reliability can beobtained.

It should be noted that besides the above, the physical quantity sensor1 can widely be applied to an electronic control unit (ECU) such as acar navigation system, a car air-conditioner, an anti-lock brakingsystem (ABS), an air-bag system, a tire pressure monitoring system(TPMS), an engine controller, or a battery monitor for a hybrid car oran electric car.

Further, the vehicle is not limited to the car 1500, but can also beapplied to, for example, an airplane, a rocket, an artificial satellite,a ship and a boat, an automated guided vehicle (AGV), a two-leggedrobot, and an unmanned drone such as a drone.

Although the physical quantity sensor, the physical quantity sensordevice, the electronic apparatus, and the vehicle according to theinvention are hereinabove described based on the respective embodimentsshown in the accompanying drawings, the invention is not limited to theembodiments, but the configuration of each of the components can bereplaced with one having an identical function and any configuration.Further, it is also possible to add any other constituents to theinvention. Further, it is also possible to arbitrarily combine any ofthe embodiments described above with each other. Further, the X-axisdirection (the first direction) and the Y-axis direction (the seconddirection) are perpendicular to each other in the embodiments describedabove, but are not limited to this configuration. It is sufficient forthe X-axis direction and the Y-axis direction to cross each other.

Further, although in the embodiments described above, there is describedthe configuration having a single sensor element, it is possible toprovide a plurality of sensor elements. In this case, by disposing theplurality of sensor elements so as to have respective detection axesdifferent from each other, it is possible to detect the acceleration ina plurality of axial directions.

Further, although in the embodiments described above, the accelerationsensor for detecting the acceleration is described as the physicalquantity sensor, the physical quantity detected by the physical quantitysensor is not limited to the acceleration.

What is claimed is:
 1. A physical quantity sensor located at a positionrelative to an X-axis, a Y-axis, and a Z-axis orthogonal to each other,the physical quantity sensor comprising: a base; a first trunk supportfixed to the base; a second trunk support fixed to the base, the secondtrunk support being located next to the first trunk support along theY-axis; a fixing member fixed to the base, the fixing member beinglocated between the first and second trunk supports when viewed alongthe Z-axis; a pair of first trunks respectively located at both sides ofthe first trunk support along the X-axis, the pair of first trunks beingsupported by the first trunk support; a plurality of first stationaryelectrode fingers respectively disposed on the pair of first trunksalong the X-axis, the plurality of first stationary electrode fingersextending from the pair of first trunks along the Y-axis; a pair ofsecond trunks respectively located at both sides of the second trunksupport along the X-axis, the pair of second trunks being supported bythe second trunk support; a plurality of second stationary electrodefingers respectively disposed on the pair of second trunks along theX-axis, the plurality of second stationary electrode fingers extendingfrom the pair of second trunks along the Y-axis; a pair of movablemember supports respectively located at both sides of the fixing memberalong the X-axis, the pair of movable member supports being supported bythe fixing member; a frame to which the pair of movable member supportsare connected via first and second springs, respectively; a plurality offirst movable electrode fingers disposed on the frame, the plurality offirst movable electrode fingers facing the plurality of first stationaryelectrode fingers in a direction along the X-axis; and a plurality ofsecond movable electrode fingers disposed on the frame, the plurality ofsecond movable electrode fingers facing the plurality of secondstationary electrode fingers in a direction along the X-axis.
 2. Thephysical quantity sensor according to claim 1, wherein the fixing memberis fixed to the base at two positions located along the X-axis whenviewed in the Z-axis.
 3. The physical quantity sensor according to claim1, wherein the fixing member is fixed to the base at two positionslocated along the Y-axis when viewed in the Z-axis.
 4. The physicalquantity sensor according to claim 1, wherein the pair of first trunksis tilted toward one side with respect to the Y-axis, and the pair ofsecond trunks is tilted toward the other side with respect to theY-axis.
 5. The physical quantity sensor according to claim 4, whereinthe pair of first trunks is tilted with respect to a direction along theX-axis at an angle no smaller than 10° and no larger than 45°, and thepair of second trunks is tilted with respect to a direction along theX-axis at an angle no smaller than 10° and no larger than 45°.
 6. Thephysical quantity sensor according to claim 5, wherein the pair of firsttrunks is tilted with respect to the direction along the X-axis at anangle no smaller than 10° and no larger than 30°, and the pair of secondtrunks is tilted with respect to the direction along the X-axis at anangle no smaller than 10° and no larger than 30°.
 7. The physicalquantity sensor according to claim 4, wherein lengths of the pluralityof first stationary electrode fingers that are located at one side ofthe Y-axis with respect to one of the pair of first trunks that islocated at one side of the X-axis gradually decrease toward the one sideof X-axis, lengths of the plurality of first stationary electrodefingers that are located at the one side of the Y-axis with respect tothe other of the pair of first trunks that is located at the other sideof the X-axis gradually decrease toward the other side of X-axis,lengths of the plurality of first stationary electrode fingers that arelocated at the other side of the Y-axis with respect to the one of thepair of first trunks that is located at the one side of the X-axisgradually increase toward the one side of X-axis, lengths of theplurality of first stationary electrode fingers that are located at theother side of the Y-axis with respect to the other of the pair of firsttrunks that is located at the other side of the X-axis graduallyincrease toward the other side of X-axis, lengths of the plurality ofsecond stationary electrode fingers that are located at one side of theY-axis with respect to one of the pair of second trunks that is locatedat one side of the X-axis gradually increase toward the one side ofX-axis, lengths of the plurality of second stationary electrode fingersthat are located at the one side of the Y-axis with respect to the otherof the pair of second trunks that is located at the other side of theX-axis gradually increase toward the other side of X-axis, lengths ofthe plurality of second stationary electrode fingers that are located atthe other side of the Y-axis with respect to the one of the pair ofsecond trunks that is located at the one side of the X-axis graduallydecrease toward the one side of X-axis, and lengths of the plurality ofsecond stationary electrode fingers that are located at the other sideof the Y-axis with respect to the other of the pair of second trunksthat is located at the other side of the X-axis gradually decreasetoward the other side of X-axis.
 8. A physical quantity sensor devicecomprising: the physical quantity sensor according to claim 1; and acircuit configured to detect a physical quantity in response to anoutput signal from the physical quantity sensor.
 9. The physicalquantity sensor device according to claim 8, further comprising: aceramic package housing the physical quantity sensor and the circuit.10. The physical quantity sensor device according to claim 8, whereinthe physical quantity sensor and the circuit are molded together.
 11. Anelectronic apparatus comprising: the physical quantity sensor accordingto claim 1; and a case housing the physical quantity sensor.
 12. Amovable object comprising: the physical quantity sensor according toclaim 1; and an attitude control device configured to control anattitude of the movable object in response to a detection signal fromthe physical quantity sensor.
 13. A physical quantity sensor located ata position relative to an X-axis, a Y-axis, and a Z-axis orthogonal toeach other, the physical quantity sensor comprising: a base; a firsttrunk support fixed to the base; a second trunk support fixed to thebase, the second trunk support being located next to the first trunksupport along the X-axis; a fixing member fixed to the base, the fixingmember being located between the first and second trunk supports whenviewed along the Z-axis; first and second trunks located at one side ofthe first trunk support with respect to the X-axis, the first and secondtrunks being supported by the first trunk support; a plurality of firststationary electrode fingers respectively disposed on the first trunkalong the X-axis, the plurality of first stationary electrode fingersextending from the first trunk along the Y-axis; a plurality of secondstationary electrode fingers respectively disposed on the second trunkalong the X-axis, the plurality of second stationary electrode fingersextending from the second trunk along the Y-axis; third and fourthtrunks located at the other side of the second trunk support withrespect to the X-axis, the third and fourth trunks being supported bythe second trunk support; a plurality of third stationary electrodefingers respectively disposed on the third trunk along the X-axis, theplurality of third stationary electrode fingers extending from the thirdtrunk along the Y-axis; a plurality of fourth stationary electrodefingers respectively disposed on the fourth trunk along the X-axis, theplurality of fourth stationary electrode fingers extending from thefourth trunk along the Y-axis; a frame to which the fixing member isconnected via first and second springs, one side of the fixing memberwith respect to the Y-axis being connected to the frame via the firstspring, the other side of the fixing member with respect to the Y-axisbeing connected to the frame via the second spring; a plurality of firstmovable electrode fingers disposed on the frame, the plurality of firstmovable electrode fingers facing the plurality of first stationaryelectrode fingers in a direction along the X-axis; a plurality of secondmovable electrode fingers disposed on the frame, the plurality of secondmovable electrode fingers facing the plurality of second stationaryelectrode fingers in a direction along the X-axis; a plurality of thirdmovable electrode fingers disposed on the frame, the plurality of thirdmovable electrode fingers facing the plurality of third stationaryelectrode fingers in a direction along the X-axis; and a plurality offourth movable electrode fingers disposed on the frame, the plurality offourth movable electrode fingers facing the plurality of fourthstationary electrode fingers in a direction along the X-axis.
 14. Thephysical quantity sensor according to claim 13, wherein the first trunkis tilted toward one side with respect to the Y-axis, the second trunkis tilted toward the other side with respect to the Y-axis, the thirdtrunk is tilted toward the one side with respect to the Y-axis, and thefourth trunk is tilted toward the other side with respect to the Y-axis.15. The physical quantity sensor according to claim 14, wherein each ofthe first, second, third, and fourth trunks is tilted with respect to adirection along the X-axis at an angle no smaller than 10° and no largerthan 45°.
 16. The physical quantity sensor according to claim 15,wherein each of the first, second, third, and fourth trunks is tiltedwith respect to the direction along the X-axis at an angle no smallerthan 10° and no larger than 30°.
 17. The physical quantity sensoraccording to claim 14, wherein lengths of the plurality of firststationary electrode fingers that are located at one side of the Y-axiswith respect to first trunk gradually decrease toward one side ofX-axis, lengths of the plurality of first stationary electrode fingersthat are located at the other side of the Y-axis with respect to thefirst trunk gradually increase toward the one side of X-axis, lengths ofthe plurality of second stationary electrode fingers that are located atthe one side of the Y-axis with respect to the second trunk graduallyincrease toward the one side of X-axis, lengths of the plurality ofsecond stationary electrode fingers that are located at the other sideof the Y-axis with respect to the second trunk gradually decrease towardthe one side of X-axis, lengths of the plurality of third stationaryelectrode fingers that are located at the one side of the Y-axis withrespect to the third trunk gradually decrease toward the other side ofX-axis, lengths of the plurality of third stationary electrode fingersthat are located at the other side of the Y-axis with respect to thethird trunk gradually increase toward the other side of X-axis, lengthsof the plurality of fourth stationary electrode fingers that are locatedat the one side of the Y-axis with respect to the fourth trunk graduallyincrease toward the other side of X-axis, and lengths of the pluralityof fourth stationary electrode fingers that are located at the otherside of the Y-axis with respect to the fourth trunk gradually decreasetoward the other side of X-axis.
 18. A physical quantity sensor locatedat a position relative to an X-axis, a Y-axis, and a Z-axis orthogonalto each other, the physical quantity sensor comprising: a base; a firsttrunk support fixed to the base; a second trunk support fixed to thebase, the second trunk support being located next to the first trunksupport along the X-axis; a first fixing member fixed to the base, thefirst fixing member having a first extension, the first extensionextending along the Y-axis; a second fixing member fixed to the base,the second fixing member having a second extension, the second extensionextending along the Y-axis, the second fixing member being located nextto the first fixing member along the Y-axis; first and second trunkslocated at one side of the first trunk support with respect to theX-axis, the first and second trunks being supported by the first trunksupport; a plurality of first stationary electrode fingers respectivelydisposed on the first trunk along the X-axis, the plurality of firststationary electrode fingers extending from the first trunk along theY-axis; a plurality of second stationary electrode fingers respectivelydisposed on the second trunk along the X-axis, the plurality of secondstationary electrode fingers extending from the second trunk along theY-axis; third and fourth trunks located at the other side of the secondtrunk support with respect to the X-axis, the third and fourth trunksbeing supported by the second trunk support; a plurality of thirdstationary electrode fingers respectively disposed on the third trunkalong the X-axis, the plurality of third stationary electrode fingersextending from the third trunk along the Y-axis; a plurality of fourthstationary electrode fingers respectively disposed on the fourth trunkalong the X-axis, the plurality of fourth stationary electrode fingersextending from the fourth trunk along the Y-axis; a frame to which bothsides of the first fixing member with respect to the X-axis areconnected via first and second springs, respectively, and to which bothsides of the second fixing member with respect to the X-axis areconnected via third and fourth springs, respectively, a plurality offirst movable electrode fingers disposed on the frame, the plurality offirst movable electrode fingers facing the plurality of first stationaryelectrode fingers in a direction along the X-axis; a plurality of secondmovable electrode fingers disposed on the frame, the plurality of secondmovable electrode fingers facing the plurality of second stationaryelectrode fingers in a direction along the X-axis; a plurality of thirdmovable electrode fingers disposed on the frame, the plurality of thirdmovable electrode fingers facing the plurality of third stationaryelectrode fingers in a direction along the X-axis; and a plurality offourth movable electrode fingers disposed on the frame, the plurality offourth movable electrode fingers facing the plurality of fourthstationary electrode fingers in a direction along the X-axis.
 19. Thephysical quantity sensor according to claim 18, wherein the first trunkis tilted toward one side with respect to the Y-axis, the second trunkis tilted toward the other side with respect to the Y-axis, the thirdtrunk is tilted toward the one side with respect to the Y-axis, and thefourth trunk is tilted toward the other side with respect to the Y-axis.20. The physical quantity sensor according to claim 19, wherein each ofthe first, second, third, and fourth trunks is tilted with respect to adirection along the X-axis at an angle no smaller than 10° and no largerthan 45°.